2020
DOI: 10.1038/s41928-020-0450-8
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Nanoscale imaging of mobile carriers and trapped charges in delta doped silicon p–n junctions

Abstract: Integrated circuits and certain silicon-based quantum devices require the precise positioning of dopant nanostructures, and hydrogen resist lithography can be used to fabricate such structures at the atomic-scale limit. However, there is no single technique capable of measuring the three-dimensional location and electrical characteristics of these dopant nanostructures, as well 3,4 5 3 von 39 11.

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Cited by 28 publications
(33 citation statements)
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“…It is worth noting that materials with even small conductivities appear as "metallic" for such low frequencies. In some specific setups, and by using the heterodyne detection method, very large frequencies, beyond the dielectric relaxation frequency of the material (typically in the GHz range) can be also considered (Gramse et al, 2020). In these cases, the modeling needs to include explicitly the conductivity effects.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…It is worth noting that materials with even small conductivities appear as "metallic" for such low frequencies. In some specific setups, and by using the heterodyne detection method, very large frequencies, beyond the dielectric relaxation frequency of the material (typically in the GHz range) can be also considered (Gramse et al, 2020). In these cases, the modeling needs to include explicitly the conductivity effects.…”
Section: Methodsmentioning
confidence: 99%
“…In this case, materials will appear as "metallic" only when they display a significant conductivity. We do not consider this case in the present work (see, for instance, Gramse et al, 2020). In the quantitative analysis, first the tip geometry is determined from electric force measurements made on a bare part of the conducting substrate by comparing them with the corresponding theoretically calculated electric forces, with the tip radius and half cone angle as fitting parameters.…”
Section: Methodsmentioning
confidence: 99%
“…Thus, a balance must be achieved for the realization of the experiments between preserving cell structure and being able to measure its dielectric properties with in-liquid SDM. Typically, using the experimental setup we implemented for this work, allows to reach the 10-100 MHz frequency range of applied electric voltage, and considering other similar implementations one can even reach the GHz range if a refinement of the electric shielding circuitry is carried out [54]. This experimental limitation sets a limit for the molarity of the solution to be used, which for our case is in the order of 10-20 mM range (this number depends also on the chemical composition of the solute), but could possibly be extended to 100's mM if the GHz frequencies are used.…”
Section: 1402 8 Of 13mentioning
confidence: 99%
“…We apply high-frequency techniques operating at a few GHz, where the admittance of the capacitance scales linearly with the frequency. The exceptionally high sensitivity of GHz admittance measurements combined with the advantages of nearfield detection in microwave microscopy has recently enabled breakthroughs in diverse areas of research, including semiconductor physics, [29,30] molecular electronics, [21] biophysics, [31] and energy materials. [32] To the best of our knowledge, the direct measurements of electrochemical charge transfer by microwave microscopy-reported herein-have not been reported previously.…”
Section: Introductionmentioning
confidence: 99%