2011
DOI: 10.1002/adma.201101192
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Nanoscale Semiconductor “X” on Substrate “Y” – Processes, Devices, and Applications

Abstract: Recent advancements in the integration of nanoscale, single-crystalline semiconductor 'X' on substrate 'Y' (XoY) for use in transistor and sensor applications are presented. XoY is a generic materials framework for enabling the fabrication of various novel devices, without the constraints of the original growth substrates. Two specific XoY process schemes, along with their associated materials, device and applications are presented. In one example, the layer transfer of ultrathin III-V semiconductors with thic… Show more

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Cited by 44 publications
(31 citation statements)
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“…In order to overcome this limitation, a concerted effort has focused on the exploration of alternative reflector topologies and particularly on the identification of optical coatings capable of simultaneously achieving high-reflectivity and minimal mechanical dissipation. Building upon advances in quantum optomechanics [121], surface-emitting semiconductor lasers [122], and advanced microfabrication techniques [123], we have made significant strides towards a novel solution, successfully integrating low-loss single-crystal multilayers with super-polished optical substrates. These "crystalline coatings" have demonstrated competitive optical properties with sputtered oxide films, while simultaneously exhibiting a tenfold reduction in mechanical loss angle at room temperature [124] and promise an additional order of magnitude reduction upon cooling to cryogenic temperatures [125].…”
Section: Introductionmentioning
confidence: 99%
“…In order to overcome this limitation, a concerted effort has focused on the exploration of alternative reflector topologies and particularly on the identification of optical coatings capable of simultaneously achieving high-reflectivity and minimal mechanical dissipation. Building upon advances in quantum optomechanics [121], surface-emitting semiconductor lasers [122], and advanced microfabrication techniques [123], we have made significant strides towards a novel solution, successfully integrating low-loss single-crystal multilayers with super-polished optical substrates. These "crystalline coatings" have demonstrated competitive optical properties with sputtered oxide films, while simultaneously exhibiting a tenfold reduction in mechanical loss angle at room temperature [124] and promise an additional order of magnitude reduction upon cooling to cryogenic temperatures [125].…”
Section: Introductionmentioning
confidence: 99%
“…A silver-gold alloy with 90 at% silver and 10 at% gold was found to present an optimal balance between stability and reflectivity. [19][20][21][22][23][24][25][26][27][28] In these studies, a range of Optical interference is used to enhance light-matter interaction and harvest broadband light in ultrathin semiconductor absorber films on specular backreflectors. The silver-gold alloy layer was utilized both as a back-reflector as well as a back metallic contact.…”
mentioning
confidence: 99%
“…Categorized by principle, resistive, capacitive, piezoelectric, piezoresistive, and optical pressure sensors, have been developed over the past decades. Capacitive pressure sensors based on microstructured polydimethylsiloxane (PDMS) films demonstrate sensitivity up to 8.3 kPa −1 , but impurities and other contaminants may cause a change of the dielectric constant and affect the sensors’ performance .…”
mentioning
confidence: 99%