2019 IEEE 14th Nanotechnology Materials and Devices Conference (NMDC) 2019
DOI: 10.1109/nmdc47361.2019.9084015
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Nanoscale Three-Independent-Gate Transistors: Geometric TCAD Simulations at the 10 nm-Node

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Cited by 7 publications
(3 citation statements)
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“…Although we focus on fairly large channel lengths for demonstration purposes the RFET concept is physically scalable, [54] recently scalability down to 10 nm nodes has been verified by device TCAD simulations. [55,56] Nevertheless, the structural sizes of RFETs are by far exceeding state-of-the-art CMOS MOSFETs. However, they allow a circuit design that significantly reduces the chip area for the same logic operation compared to standard CMOS technology.…”
Section: Resultsmentioning
confidence: 99%
“…Although we focus on fairly large channel lengths for demonstration purposes the RFET concept is physically scalable, [54] recently scalability down to 10 nm nodes has been verified by device TCAD simulations. [55,56] Nevertheless, the structural sizes of RFETs are by far exceeding state-of-the-art CMOS MOSFETs. However, they allow a circuit design that significantly reduces the chip area for the same logic operation compared to standard CMOS technology.…”
Section: Resultsmentioning
confidence: 99%
“…[23] In this respect, the overlap between the PGs and the source/drain regions is critical, as a small overlap is necessary to achieve a low off-state and ensure small parasitic capacitances. [39,23,40] Therefore, we expect significantly enhanced key performance parameters of our SiGe RFET utilizing shorter channel lengths and thinner effective gate oxide thicknesses. For a convenient comparison of the key parameters of the proposed SiGe RFET with SiO 2 and HfO 2 gate dielectric, Table 1 values of the ten best SiGe RFETs compared with Al-Si-based RFETs.…”
Section: Resultsmentioning
confidence: 99%
“…Thanks to the Schottky barrier cutoff, IOFF is extremely low at 3.3 nA/μm and 0.1 nA/μm for n-and p-type operation respectively. Further work and discussion of this simulation is available in [28]. These current drives are approximately 10 X lower than the previous 22 nm TIGFET device simulations [7] which used a supply voltage of 1.2 V. This loss is primarily due to the 0.7 V supply voltage used in the 10 nm devices as is standard for technology at this node.…”
Section: Device Tcad Workmentioning
confidence: 97%