Nanoscale tilt measurement using a cyclic interferometer with polarization phase stepping and multiple reflections

Joenathan, C.; Naderishahab, T.; Bernal, Ashley; Krovetz, A. B.; Kumar, V. C. Pretheesh; Ganesan, A. R.

doi:10.1364/ao.57.000b52

Cited by 10 publications

(3 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Pisani replaced one of the mirrors of a Michelson interferometer with a pair of mirrors enclosing a small angle in which multiple reflections take place and demonstrated picometer sensitivity for displacement measurement [11]. Using similar kind of arrangement for multiple reflections, Joenathan et al demonstrated nano-radian angle sensitivity using cyclic interferometer [12,13] and picometer sensitivity in dual-arm multiple-reflection Michelson interferometer [14].…”

Section: Multi-pass Interferometrymentioning

confidence: 99%

Multi-pass, multi-beam and multi-wavelength optical interferometries

Sirohi¹

2019

AJP

View full text Add to dashboard Cite

This article is dedicated to Prof Kehar Singh for his significant contributions to Optics and Photonics Optical interferometry is perhaps the oldest precision measurement technique that has evolved in its various variants due to the developments in optical sources and detector systems, and varied applications. Some of the variants are developed to enhance the accuracy of measurement and also the ease of measurement. This paper discusses the theory of multi-pass, multi-beam and multi-wavelength interferometries.

show abstract

Section: Multi-pass Interferometrymentioning

confidence: 99%

Multi-pass, multi-beam and multi-wavelength optical interferometries

Sirohi¹

2019

AJP

View full text Add to dashboard Cite

show abstract

“…However, the nonlinearity and unstable signals were the potential sources of systematic inaccuracies in the phase production [4]. Several methods for achieving automated phase shift have been published using a PZT [5][6][7]. According to [8], this could be achieved by using the cyclic polarized light at a tilt angle.…”

Section: Introductionmentioning

confidence: 99%

The comparison of multi-stepping algorithms for real-time thickness measurement of transparent thin films using polarization settings

Usman¹,

Jiraraksopakun²,

Kaewon³

et al. 2022

Laser Phys.

View full text Add to dashboard Cite

This paper presents the comparison of three-, four- and five-step techniques for measuring transparent thin-film thickness of T a 2 O 5 and W O 3 deposited on BK-7 substrates. The Sagnac interferometer was modified with phase shifting approach for the determination of thin-film thickness. The input light beam was split into reference and testing beams. Before the output light reaching the balanced photodetectors, the real-time signal detection was performed to obtain the output intensities of both beams using three-, four-, and five-polarization settings of an analyzer. The thicknesses could then be efficiently translated from the measured intensities. Thicknesses from three-, four- and five-stepping algorithms were compared with ones from the conventional FE-SEM measurement, and it was discovered that the former performed better with less errors. The findings show that the phase-shifting technique using three-polarization settings is more suitable for the thickness measurement of the transparent thin film.

show abstract

“…. Several factors made speckle correlation more attractive compared to the interference techniques that had been used for sensing tilt and deformation 23–26 till then. For example, speckle correlation required fewer optical elements, used an interferenceless optical configuration and gave rise to the possibility of real-time monitoring 22 .…”

Section: Introductionmentioning

confidence: 99%

Spatial Multiplexing Technique for Improving Dynamic Range of Speckle Correlation based Optical Lever

Anand

Bhattacharya

Rosen

2019

Sci Rep

View full text Add to dashboard Cite

Speckle correlation based optical levers (SC-OptLev) possess attractive characteristics suitable for sensing small changes in the angular orientations of surfaces. In this study, we propose and demonstrate a spatial multiplexing technique for improving the dynamic range of SC-OptLev. When the surface is in its initial position, a synthetic speckle intensity pattern, larger than the area of the image sensor is created by transversely shifting the image sensor and recording different sections of a larger speckle pattern. Then, the acquired images are stitched together by a computer program into one relatively large synthetic speckle pattern. Following the calibration stage, the synthetic speckle intensity pattern is used to sense changes in the surface’s angular orientation. The surface is monitored in real-time by recording part of the speckle pattern which lies within the sensor area. Next, the recorded speckle pattern is cross-correlated with the synthetic speckle pattern in the computer. The resulting shift of the correlation peak indicates the angular orientations of the reflective surface under test. This spatial-multiplexing technique enables sensing changes in the angular orientation of the surface beyond the limit imposed by the physical size of the image sensor.

show abstract

Nanoscale tilt measurement using a cyclic interferometer with polarization phase stepping and multiple reflections

Cited by 10 publications

References 18 publications

Multi-pass, multi-beam and multi-wavelength optical interferometries

Multi-pass, multi-beam and multi-wavelength optical interferometries

The comparison of multi-stepping algorithms for real-time thickness measurement of transparent thin films using polarization settings

Spatial Multiplexing Technique for Improving Dynamic Range of Speckle Correlation based Optical Lever

Contact Info

Product

Resources

About