1997
DOI: 10.1088/0957-4484/8/3a/003
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Nanostructure fabrication on silicon surfaces by atom transfer from a gold tip using an ultrahigh vacuum scanning tunneling microscope

Abstract: A novel ultrahigh vacuum system for the fabrication and measurement of nanostructures has been developed, which consists of a preparation chamber, a precise mask deposition facility, a scanning tunneling microscope (STM) for nanofabrication, and a low temperature four-contact-probe apparatus. Using the field-induced atom transfer from a gold STM tip, it has been demonstrated that nanometer-scale gold structures can be fabricated not only on an atomically clean - surface but also in a gap region among four ma… Show more

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Cited by 11 publications
(4 citation statements)
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“…Another method of surface modification is the direct transfer of material from the probe to the surface [31][32][33][34][35][36][37] . The distinctive feature of these experiments is that the voltage is applied in short pulses, the distance between the probe and the surface is very small, typically less than 1-2 nm.…”
Section: Experiments and Discussionmentioning
confidence: 99%
“…Another method of surface modification is the direct transfer of material from the probe to the surface [31][32][33][34][35][36][37] . The distinctive feature of these experiments is that the voltage is applied in short pulses, the distance between the probe and the surface is very small, typically less than 1-2 nm.…”
Section: Experiments and Discussionmentioning
confidence: 99%
“…The threshold voltage for gold atom transfer is approximately ∼5 V. The corresponding electric field of ∼ 5 V nm −1 is significantly lower than the reported threshold value for the field evaporation of Au − (∼17 V nm −1 ) [30]. Although the deposition of gold nanodots on clean Si surfaces in UHV was successfully demonstrated by applying voltage pulses and has been extensively studied [24,29], the formation of continuous nanowires was found to be difficult due to the low deposition probability of gold (∼60%) [23].…”
Section: Nanostructure Fabrication By Tip-materials Transfer Using Volmentioning
confidence: 90%
“…One of the most intensively investigated STM-based nanofabrication techniques is the electric-field-induced material transfer of a tip to a substrate through the application of voltage pulses [16][17][18][19][20][21][22][23][24][25][26][27][28][29]. Because the pulse width applied is less than ∼1 ms, this method is fast.…”
Section: Nanostructure Fabrication By Tip-materials Transfer Using Volmentioning
confidence: 99%
“…14 Since Mamin et al 12. first reported the fabrication of gold mounds by field‐emission lithography with an ultrahigh‐vacuum scanning tunneling microscope (UHV‐STM) and a gold probe, various other metallic nanostructures have been patterned, including gold on silicon surfaces,15, 16 copper on gold17 and silicon surfaces,16 and platinum on silicon surfaces 18. More recently, to directly deposit gold onto silicon surfaces, field‐emission lithography has been carried out with atomic force microscopy (AFM) in contact mode under UHV conditions19 and in noncontact mode in air 20.…”
mentioning
confidence: 99%