2008
DOI: 10.1016/j.apsusc.2007.10.014
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Nanostructure of thin silicon films by combining HRTEM, XRD and Raman spectroscopy measurements and the implication to the optical properties

Abstract: A series of thin silicon films with different degrees of crystallinity were prepared by decomposition of silane gas highly diluted with hydrogen, in radiofrequency glow discharge. The crystallite size, shape, and the portion of crystalline phase were investigated by highresolution transmission electron microscopy (HRTEM), selected area electron diffraction (SAED), Raman spectroscopy (RS), and X-ray powder diffraction (XRD). The absorption coefficient (a) was calculated from the measurement of UV-vis-transmitta… Show more

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Cited by 33 publications
(15 citation statements)
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“…Although the X-ray diffraction patterns support the absence of crystalline order, it is possible that some local order (e.g. nanocrystallites) is present in the films [18]. Nanocrystalline phases can be detected using TEM analysis which, however, is beyond the scope of present communication.…”
Section: Amorphous Vs Crystalline Phasesmentioning
confidence: 96%
“…Although the X-ray diffraction patterns support the absence of crystalline order, it is possible that some local order (e.g. nanocrystallites) is present in the films [18]. Nanocrystalline phases can be detected using TEM analysis which, however, is beyond the scope of present communication.…”
Section: Amorphous Vs Crystalline Phasesmentioning
confidence: 96%
“…The recorded spectra were processed to determine the refractive index, absorption coefficient, and the thickness of films using the PUMA computer code [16,17]. We used this method to characterize both a-Si and nc-Si on quartz substrates.…”
Section: Resultsmentioning
confidence: 99%
“…The crystalline fraction and individual size of crystals increases with power density and silane dilution. More details abut the deposition conditions and theirs influence on nano-size properties are published elsewhere [4,7,8].…”
Section: Methodsmentioning
confidence: 99%
“…However, the films examined in this work have somewhat wider distribution of nano-crystal sizes [4] and lower hydrogen concentration that is below 10 at.%.…”
Section: Introductionmentioning
confidence: 95%