Thin-film lithium-ion batteries are the most competitive power sources for various kinds of micro-electro-mechanical systems and have been extensively researched. The present paper reviews the recent progress on Sn-based thin-film anode materials, with particular emphasis on the preparation and performances of pure Sn, Sn-based alloy, and Sn-based oxide thin films. From this survey, several conclusions can be drawn concerning the properties of Sn-based thin-film anodes. Pure Sn thin films deliver high reversible capacity but very poor cyclability due to the huge volume changes that accompany lithium insertion/extraction. The cycle performance of Sn-based intermetallic thin films can be enhanced at the expense of their capacities by alloying with inactive transition metals. In contrast to anodes in which Sn is alloyed with inactive transition metals, Sn-based nanocomposite films deliver high capacity with enhanced cycle performance through the incorporation of active elements. In comparison with pure Sn anodes, Sn-based oxide thin films show greatly enhanced cyclability due to the in situ formation of Sn nanodispersoids in an Li 2 O matrix, although there is quite a large initial irreversible capacity loss. For all of these anodes, substantial improvements have been achieved by micro-nanostructure tuning of the active materials. Based on the progress that has already been made on the relationship between the properties and microstructures of Sn-based thin-film anodes, it is believed that manipulating the multi-phase and multi-scale structures offers an important means of further improving the capacity and cyclability of Sn-based alloy thin-film anodes. Lithium-ion batteries are widely used nowadays as important power sources for portable electronic devices and electric or hybrid vehicle (EV/HEV) applications due to their high energy density, high voltage, and long lifespan. At present, large-scale and miniaturization are the two most important development directions for high-performance lithium-ion batteries. With respect to miniaturization, the major task is developing thin-film/micro-batteries that might be applied in micro-electro-mechanical systems (MEMS), smart cards, implantable medical devices, and so on. As for conventional batteries, high specific capacity of electrode materials is an essential requirement for thin-film batteries [1]. Moreover, ultra-thin form, good flexibility, and high energy density are the most important properties of thinfilm Li-ion batteries, which depend on the cathodes, anodes, electrolyte, and current collectors that comprise the thinfilm structure [2]. In early work, lithium metal films were widely studied as anodes for thin-film Li-ion batteries. However, lithium metal is very flammable and air-and water-sensitive. Moreover, minute lithium dendrites could form on the anodes when such lithium batteries were rapidly charged, and these in turn could induce short circuits, causing the battery to rapidly overheat and catch fire. This hazard limited the application of lithium-film a...