Nano- And Microfabrication for Industrial and Biomedical Applications 2016
DOI: 10.1016/b978-0-323-37828-4.00004-2
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Nanotechnology

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Cited by 3 publications
(2 citation statements)
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“…9,10 The limitations of this deposition technology are related to expensive equipment, multistep requirement for complex structures and pattern fabrication only on planar substrates. 9,11 Electrochemical or layer-by-layer deposition overcome some of the nanolithography drawbacks in terms of deposition of conformal coatings on complex geometries, but it is still a costly process that requires a multistep procedure and long deposition times. 12 Plasma and chemical etching on the other hand provides faster surface roughness modifications compared with nanolithography and layer-by-layer deposition but may introduce defects to the substrate surface.…”
Section: Introductionmentioning
confidence: 99%
“…9,10 The limitations of this deposition technology are related to expensive equipment, multistep requirement for complex structures and pattern fabrication only on planar substrates. 9,11 Electrochemical or layer-by-layer deposition overcome some of the nanolithography drawbacks in terms of deposition of conformal coatings on complex geometries, but it is still a costly process that requires a multistep procedure and long deposition times. 12 Plasma and chemical etching on the other hand provides faster surface roughness modifications compared with nanolithography and layer-by-layer deposition but may introduce defects to the substrate surface.…”
Section: Introductionmentioning
confidence: 99%
“…One of the main advantages of MPL is that it enables the localization of photochemically induced polymerization to the focal point of the incident laser beam, resulting in the precise fabrication of structures with feature sizes below the diffraction limit of light. Given these capabilities, MPL offers true 3D structuring at a very small scale, a superior manufacturing property over traditional lithographic approaches, proven to highly beneficial in various scenarios across multidisciplinary fields such as microelectronics, micro-optics/photonics, biomedicine, and microfluidics …”
Section: Introductionmentioning
confidence: 99%