The optical properties of high quality large bulk AlN crystals have been tested by cathodoluminescence measurements carried out at different temperatures, excitation densities and electron beam energies. Both c-plane (0001) and a-plane (11 2 0) wafers were cut from bulk, single-crystals of AlN which were fabricated by the sublimation-recondensation technique. The wafer surfaces were subsequently prepared by chemical-mechanical polishing. The low-temperature near-band-edge cathodoluminescence spectra of a typical a-plane oriented AlN crystal show up to five transitions, which are tentatively assigned to free-and bound exciton recombination processes.
IntroductionThe unusual combination of important physical properties of III-nitrides based semiconductors has motivated rapid research progress in the past decade, which culminated with the commercial availability of a number of optoelectronic devices. Such development was achieved in part because of the excellent luminescence efficiency of GaN light emitting diodes (LED) despite the high dislocation densities observed in the active layers heteroepitaxially grown on a variety of substrate materials. The lattice and thermal expansion mismatch of the substrate are in great part responsible for the resulting characteristics of the film grown on it [1]. Methods to produce large bulk single crystal III-nitrides native substrate candidates, as for example GaN, are still lacking. Therefore the semiconductor device industry is forced to choose alternative substrates such as sapphire and SiC. Aside from GaN, aluminium nitride (AlN) is another native substrate for nitride based semiconductor device fabrication. AlN has the same crystal structure as GaN, with a lattice mismatch along the c-plane of only 2.4%, higher thermal conductivity than, and chemical compatibility with GaN. Besides these excellent properties for high power and high temperature applications, AlN has a large direct band gap in the deep UV region at about 6.28 eV at 5 K [2] and 6.2 eV at room temperature [3]. In order to achieve fabrication of efficient emitters and detectors working in the deep UV region high-quality AlGaN alloys with high Al mole fractions are required. A homoepitaxial layer is one of the basic requirements for the fabrication of device quality layers with high Al mole concentration. In this case, AlN is the logical starting point for use as a substrate, especially for the growth of graded buffer layers to match the desired Al mole fraction. Due to technical difficulties involved in the deep UV luminescence measurements and the lack of high quality AlN samples, only few publications have reported the detection of band-edge emission of AlN. Most of the studies discussed the photo-and cathodoluminescence characterization of AlN films [4 -9], and fewer focused on bulk AlN single crystals [10][11][12]. In the present work we report on the results of the structural and optical properties of high quality large bulk AlN single crystals grown by a self-seeded