Near-Navigation Grade Tuning Fork MEMS Gyroscope

Endean, Daniel; Christ, Kevin V.; Duffy, Patrick; Freeman, Eugene; Glenn, M.; Gnerlich, Markus; Johnson, B. C.; Weinmann, Jacob

doi:10.1109/isiss.2019.8739669

Cited by 39 publications

(9 citation statements)

References 9 publications

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“…At the state of the art, the most impressive results were achieved by using large-area devices with specialized packages and accurate calibration algorithms: (i) Challoner in [4] (Boeing gyroscope), used mode-matched disk resonator gyroscopes with a 8-mm diameter, reaching 0.0035 • / √ hr angle random walk (ARW) and 0.012 • /hr uncompensated bias instability (BI) for an overall structural volume of about 6.4 mm 3 and a vacuum-sealed LCC package volume of 1 cm 3 . Very similar performances were recently achieved by Xu et al in [5] with a 8-mm diameter honeycomb disk structure; (ii) Endean in [6] (Honeywell gyroscope), relying on a modesplit capacitive gyroscope with calibration and post-acquisition compensation of environmental effects, showed 0.003 • / √ hr noise and 0.01 • /hr stability in a 500 mm 3…”

Section: Introductionsupporting

confidence: 74%

1.3 mm² Nav-Grade NEMS-Based Gyroscope

Gadola

Buffoli

Sansa

et al. 2021

J. Microelectromech. Syst.

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The research reports the design and experimental results of novel gyroscopes based on nano-resistive sensing, capable to meet navigation grade specifications within a sensor footprint of 1.3 mm 2 and a total silicon structural volume of 0.026 mm 3 only. A significant increase of the scale-factor is obtained through a combination of (i) optimization of the Coriolis force transduction into a stress on the resistive gauges, (ii) increase of the drive motion amplitude and (iii) increase of the current through the sensing gauges. Combined with low-pressure eutectic packaging, this enables approaching the thermomechanical noise limits of the sensor at about 0.004 • / √ hr. At the same time, electronics is developed with minimum demodulation phase errors, thus enabling optimized closed-loop quadrature compensation and minimization of drift effects. Thanks to the inherent rejection of parasitic couplings and associated drifts of the used technology, the overall stability reaches 0.02 • /hr on average on 6 samples. These performances are demonstrated for a 30-Hz system bandwidth and few hundred dps input range over several samples. Navigation grade performance are confirmed by additional in-operation experiments like gyrocompassing and in-run 9-minute long angle measurements from rate integration.

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Section: Introductionsupporting

confidence: 74%

1.3 mm² Nav-Grade NEMS-Based Gyroscope

Gadola

Buffoli

Sansa

et al. 2021

J. Microelectromech. Syst.

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“…However, the bandwidth performance is usually poor. Although micro-gyroscopes can use a complex structural design and compensation technology to achieve the navigation level requirements [ 16 ], the production costs will inevitably increase. Rather, the FM micro-gyroscope can avoid the drawbacks of the tradeoff between bandwidth and sensitivity of the AM micro-gyroscope.…”

Section: Introductionmentioning

confidence: 99%

Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation

et al. 2023

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Electrostatic force nonlinearity is widely present in MEMS systems, which could impact the system sensitivity performance. The Frequency modulation (FM) method is proposed as an ideal solution to solve the problem of environmental fluctuation stability. The effect of electrostatic force nonlinearity on the sensitivity performance of a class of FM micro-gyroscope is investigated. The micro-gyroscope consists of a tapered cantilever beam with a tip mass attached to the end. Considering the case of unequal width and thickness, the motion equations of the system are derived by applying Hamilton’s principle. The differential quadrature method (DQM) was used to analyze the micro-gyroscope’s static deflection, pull-in voltage, and natural frequency characteristics. We observed that from the onset of rotation, the natural frequencies of the drive and sense modes gradually split into a pair of natural frequencies that were far from each other. The FM method directly measures the angular velocity by tracking the frequency of the drive and sense modes. Then, based on the linear system, the reduced-order model was used to analyze the influence of the shape factor and DC voltage on the sensitivity performance. Most importantly, the nonlinear frequency of system was obtained using the invariant manifold method (IMM). The influence of electrostatic force nonlinearity on the performance of the FM micro-gyroscope was investigated. The results show that the different shape factors of width and thickness, as well as the different DC voltages along the drive and sense directions, break the symmetry of the micro-gyroscope and reduce the sensitivity of the system. The sensitivity has a non-linear trend with the rotation speed. The DC voltage is proportional to the electrostatic force nonlinearity coefficient. As the DC voltage gradually increases, the nonlinearity is enhanced, resulting in a significant decrease in the sensitivity of the micro-gyroscope. It is found that the negative shape factor (width and thickness gradually increase along the beam) can effectively restrain the influence of electrostatic force nonlinearity, and a larger dynamic detection range can be obtained.

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“…Microelectromechanical system (MEMS) Coriolis vibratory gyroscopes (CVGs) have been revealed enormous potential for high-end applications, even for the applications of near-navigation grade [1][2][3][4][5]. Among the MEMS gyroscopes with the top performances, the MEMS CVGs with axisymmetric resonators, for instance, ring [6] or disk [7][8][9], hemispherical [10][11][12], and quad-mass [13][14][15] resonators, are particularly appealing by virtue of their angular rate-integrating ability, which offers benefits of high dynamics, wide ranges, and shock and vibration resistance.…”

Section: Introductionmentioning

confidence: 99%

Characterization of Modal Frequencies and Orientation of Axisymmetric Resonators in Coriolis Vibratory Gyroscopes

et al. 2021

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This paper presents the characterization of the modal frequencies and the modal orientation of the axisymmetric resonators in Coriolis vibratory gyroscopes based on the approaches of the frequency sweep and the ring down. The modal frequencies and the orientation of the stiffness axis are the key parameters for the mechanical correction of the stiffness imperfections. The frequency sweep method utilizes the zero and the poles in the magnitude-frequency responses of the two-dimensional transfer function to extract the modal orientation information within the frequency domain. The ring down method makes use of the peak and the valley values of the beat signals at the readout electrodes to obtain the modal orientation and the coefficient of the nonlinear stiffness directly within the time domain. The proposed approaches were verified via a silicon ring resonator designed for gyroscopic sensing and the modal information from the experiments exhibited a good agreement between the methods of the frequency sweep and the ring down.

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Near-Navigation Grade Tuning Fork MEMS Gyroscope

Cited by 39 publications

References 9 publications

1.3 mm² Nav-Grade NEMS-Based Gyroscope

1.3 mm² Nav-Grade NEMS-Based Gyroscope

Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation

Characterization of Modal Frequencies and Orientation of Axisymmetric Resonators in Coriolis Vibratory Gyroscopes

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Near-Navigation Grade Tuning Fork MEMS Gyroscope

Cited by 39 publications

References 9 publications

1.3 mm2 Nav-Grade NEMS-Based Gyroscope

1.3 mm2 Nav-Grade NEMS-Based Gyroscope

Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation

Characterization of Modal Frequencies and Orientation of Axisymmetric Resonators in Coriolis Vibratory Gyroscopes

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Product

Resources

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1.3 mm² Nav-Grade NEMS-Based Gyroscope

1.3 mm² Nav-Grade NEMS-Based Gyroscope