2021
DOI: 10.1109/tmtt.2021.3079497
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Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Abstract: In this article, near-zero drift and high electromechanical coupling acoustic resonators have been designed and demonstrated. The acoustic resonator is based on Lamb acoustic waves in a bimorph composed of lithium niobate on silicon dioxide. Our approach breaks through a performance boundary in conventional Lamb-wave resonators by introducing the bimorph while operating at higher order resonant modes. This enables the resonator to achieve frequency scalability, a low-temperature coefficient of frequency, and h… Show more

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Cited by 29 publications
(2 citation statements)
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“…As p increases from 5 µm to 20 µm, the measured decreases from 21.3% to 15.8% gradually as shown in Figure 8 b. To better understand the variation of the with different p , we adopt Berlincour’s Formulations (7) and (8) for electromechanical coupling calculation, which can be expressed as [ 27 , 28 , 29 ] where K 2 is the electromechanical coupling, U m , U d , and U e are the mutual energy, electrical energy, and elastic energy. E , d , T and V are the electric field, the piezoelectric coefficient, stress, and volume of the piezoelectric material, respectively.…”
Section: Fabrication and Resultsmentioning
confidence: 99%
“…As p increases from 5 µm to 20 µm, the measured decreases from 21.3% to 15.8% gradually as shown in Figure 8 b. To better understand the variation of the with different p , we adopt Berlincour’s Formulations (7) and (8) for electromechanical coupling calculation, which can be expressed as [ 27 , 28 , 29 ] where K 2 is the electromechanical coupling, U m , U d , and U e are the mutual energy, electrical energy, and elastic energy. E , d , T and V are the electric field, the piezoelectric coefficient, stress, and volume of the piezoelectric material, respectively.…”
Section: Fabrication and Resultsmentioning
confidence: 99%
“…Additionally, the magnitudes of the stress and E field are perfectly overlapped in a cosine shape, indicating a stronger coupling compared with other modes such as A 1 mode, whose E field is evenly distributed along thickness direction. 27) The calculated piezoelectric constants of LN as a function of the Euler angle θ and ψ are shown in Figs. 3(a) and 3(b), respectively.…”
Section: Simulationmentioning
confidence: 99%