Nearly diffraction-limited hard X-ray line focusing with hybrid adaptive X-ray mirror based on mechanical and piezo-driven deformation

Abstract

We have developed the new hybrid adaptive X-ray mirror based on mechanical and piezo-driven deformation to realize precise shape controllability on a long-length mirror. The mechanical bender approximately provides the required ellipse, while the piezoelectric actuators attached to the mirror correct very small residual errors to satisfy the diffraction-limited condition. The mechanical bender significantly reduces the role of the piezoelectric actuator, resulting in the suppression of accuracy degradation due to the drift and/or junction effect of the piezoelectric actuators. In addition, line focusing was demonstrated with two different numerical apertures at SPring-8, and the obtained beam sizes were 127 and 253 nm (FWHM), which agree well with the diffraction-limited sizes.

Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system

“…[17][18][19][20][21] Moreover, a hybrid deformable mirror comprising a precision mechanical bender and a bimorph deformable mirror was recently proposed, in which the demerits of the bimorph mirror, such as drifts over time and junction effects, 18 are effectively compensated by the mechanical bender, thereby enabling stable operation. [22][23][24] In the hybrid deformable mirror, the target shape can be generated comprehensively by mechanically applying moments at both ends and distributing the moments induced by piezoelectric actuators on the bimorph mirror. Practically, each of the two bending mechanisms can generate deformation profiles up to third-order polynomials, leading to various combinations of the mechanical bender and bimorph mirror contributions.…”

Study on the X-ray mirror quality specification in advanced light source

“…On the other hand, the calculation method in this paper can also be used to study other problems, such as vibration, coherence control, and others, which require many wave calculations. In addition, some adaptive X-ray mirrors have been reported to control and correct lowfrequency defects [20,21], and we hope to investigate such mirrors in the future.…”

Адаптивная И Активная Рентгеновская Оптика

“…Деформируемые зеркала, использованные в работах [75,76], представляют собой гибридные системы, состоящие из пьезоэлектрического биморфного зеркала и механического изгибного устройства. В этой конфигурации пьезоэлектрические актюаторы на ДЗ вносят очень небольшую коррекцию в погрешность формы после механического изгиба.…”

“…Напротив, в гибридной системе этот эффект значительно снижен, поскольку изгибающий момент обеспечивается механическим изгибным устройством. Поскольку ограничения на изготовление пьезоэлектрических пластин Авторы работ [75,76,79] построили двухступенчатую адаптивную зеркальную систему KБ с использованием четырех пьезоэлектрически деформируемых ДЗ. Использование четырех ДЗ позволило добиться формирования коллимированных рентгеновских пучков с переменным сечением пучка с параллельностью ∼ 1 µrad или фокусировки РЛ с изменяемым размером фокуса без необходимости изменения положения зеркала или образца путем простой деформации четырех зеркал.…”