Neon-FIB for the Fabrication of Tips for Atom Probe Tomography and Electron Tomography

Allen, Frances; Notte, John; Xia, Deying; Blanchard, Paul T.; Zhang, Ruopeng; Minor, Andrew M.; Sanford, Norman A.

doi:10.1017/s1431927620013719

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Specimens For Materials Analysis1

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2021

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“…However, although the neon FIB allows for more precise milling, it should be noted that beam-induced damage such as dislocations are still compa-rable to those resulting from the conventional gallium FIB method [197]. The application of neon FIB milling for the fabrication of tips for atom probe tomography, similarly limited by gallium-only milling for certain materials, is also underway [216].…”

Section: Specimens For Materials Analysismentioning

confidence: 99%

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

Allen¹

2021

Beilstein J. Nanotechnol.

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The helium ion microscope has emerged as a multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has extended the reach of this technology even further. This paper reviews the materials modification research that has been enabled by the helium ion microscope since its commercialization in 2007, ranging from fundamental studies of beam–sample effects, to the prototyping of new devices with features in the sub-10 nm domain.

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Section: Specimens For Materials Analysismentioning

confidence: 99%

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

Allen¹

2021

Beilstein J. Nanotechnol.

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show abstract

Neon-FIB for the Fabrication of Tips for Atom Probe Tomography and Electron Tomography

Abstract: This is an Accepted Manuscript for the Microscopy and Microanalysis 2020 Proceedings. This version may be subject to change during the production process.

Cited by 1 publication

References 5 publications

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

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