Network hydration, ordering and composition interplay of chemical vapor deposited amorphous silica films from tetraethyl orthosilicate

An innovative kinetic model allowing insight in the moderate temperature chemical vapor deposition of silicon oxynitride films from tris(dimethylsilyl)amine

“…For this reason, accurate composition results in terms of Si, O, N, C and H contents were obtained by coupling Rutherford Backscattering Spectroscopy (RBS), Nuclear Reaction Analysis (NRA) and Elastic Recoil Detection Analysis (ERDA) (shortly referred to as ion beam analyses, IBA), performed at the Pelletron facility of CEMHTI in Orléans, France. Details on these characterizations have been reported elsewhere [15,28].…”

Critical Level of Nitrogen Incorporation in Silicon Oxynitride Films: Transition of Structure and Properties, toward Enhanced Anticorrosion Performance

“…22 Details on the above characterizations have been described in previous publications. 18,23 Chemical structure…”

“…22 Details on the above characterizations have been described in previous publications. 18,23 Chemical Structure. The chemical structure of the deposited SiO x N y films was assessed in transmission mode by FT-IR (Frontier FT-IR MIR/NIR spectrometer), equipped with a custom-made substrate support that facilitated rotation of the sample in relation to the incident beam.…”

“…25 The nanostructure of the film was studied with high-resolution transmission electron microscope (HR-TEM) operating at 80 kV, as described in a previous work. 23 Nanodiffraction and HR-TEM imaging were used to determine the morphology and the amorphous or crystalline state of the film. Additional chemical information was obtained by scanning transmission electron microscopy-high angle annular dark field (STEM-HAADF) imaging and electron energy loss spectroscopy (EELS).…”

“…STEM-HAADF images were acquired with a 68−174.5 mrad inner− outer collection angle, using a 0.1 nm probe size. A cross-section of the SiO x N y film was prepared by focused ion beam (FIB) method described elsewhere, 23 stored under inert atmosphere, and analyzed with minimal delay to reduce contamination. Functional and Mechanical Properties.…”