2008
DOI: 10.1117/1.2964288
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New approach of fabrication and dispensing of micromachined cesium vapor cell

Abstract: International audienceWe describe the fabrication of wafer-scale alkali vapor cells based on silicon micromachining and anodic bonding. The principle of the proposed micromachined alkali cell is based on an extremely compact sealed vacuum cavity of a few cubic millimeters containing caesium vapors, illuminated by a high-frequency modulated laser beam. The alkali cells are formed by sealing an etched silicon wafer between two glass wafers. The technique of cell filling involves the use of an alkali dispenser. T… Show more

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Cited by 31 publications
(14 citation statements)
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“…Alkali chromates (or molybdates) can be reacted with zirconium, titanium, aluminum, or silicon at a much higher temperature (above 350 C) to produce elemental alkali metal [97][98][99][100] …”
Section: Micromachined Alkali Vapor Cells a Alkali Metalsmentioning
confidence: 99%
See 1 more Smart Citation
“…Alkali chromates (or molybdates) can be reacted with zirconium, titanium, aluminum, or silicon at a much higher temperature (above 350 C) to produce elemental alkali metal [97][98][99][100] …”
Section: Micromachined Alkali Vapor Cells a Alkali Metalsmentioning
confidence: 99%
“…Cells have been fabricated 100,130 by placing a small pill 131 of ðCs 2 MoO 4 Þ=Zr=Al (or ðCs 2 CrO 4 Þ=Zr=Al) inside the vapor cell preform before bonding, as shown in Fig. 13(a).…”
Section: Introduction Of Alkali Atomsmentioning
confidence: 99%
“…29 The cells have a two chamber design, with one chamber housing a Cs dispenser and a separate chamber of 2 mm diameter for atom interrogation. After cell sealing, atomic Cs is released from the dispenser by local heating with a laser beam, using the post-activation process reported by Nieradko et al 30 The cells also contain pure Ne buffer gas that shows a nonlinear temperature dependence of the Cs clock transition frequency, resulting in suppressed temperature sensitivity close to the inversion temperature of 81 C. 26,31 We measure the intrinsic frequency of the Cs-Ne vapor cells using an experimental atomic clock, 31,32 see Fig. 1(a).…”
mentioning
confidence: 99%
“…Experimental setup and measurements: We have realised pressure shift measurements through optical detection of CPT resonances in Ne buffer-gas-filled Cs vapour cells, microfabricated according to the process flow described in [10]. The experimental setup is shown in Fig.…”
mentioning
confidence: 99%