2010
DOI: 10.1134/s1063785010100196
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New approach to metrology in nanotechnology

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Cited by 4 publications
(6 citation statements)
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“…Joint use of the methods suggested in this paper and developed computer methods of SEM image processing provides the habit determination and the notice in this paragraph doesn't disprove the suggested methods of habit determination but only specifies practice of their use [4,29,30].…”
Section: a Focusing Plane Of The Parallel Beam And Initial Focusingmentioning
confidence: 89%
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“…Joint use of the methods suggested in this paper and developed computer methods of SEM image processing provides the habit determination and the notice in this paragraph doesn't disprove the suggested methods of habit determination but only specifies practice of their use [4,29,30].…”
Section: a Focusing Plane Of The Parallel Beam And Initial Focusingmentioning
confidence: 89%
“…3, therefore yields of recoil electrons generated both the beams are also equal (Figure 2(A)). If to superpose an intensity profile, corresponding to the parallel beam, over an intensity profile, conforming to the convergence beam and a focus on some cross-section of an object, then these profiles cross at a point where the focusing plane of the convergence beam intersects the intensity profile also of this beam (Figure 2(B)) [29]. If to subtract an intensity profile corresponding to the parallel beam from a profile conforming to a convergent beam, the extrema and zeros of the differential curves observed in the vicinity of the same "crossing" point.…”
Section: Methods Of Habit Determination Founded On the Use Of Convergmentioning
confidence: 99%
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