New architectures for micromechanical coupled beam array filters

Bouchaala, Adam; Syms, R.R.A.

doi:10.1007/s00542-020-05116-w

Cited by 6 publications

(5 citation statements)

References 35 publications

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“…In this section, we review our own LEM of a coupled beam filter with a parallel plate drive [36,40], giving the main equations for completeness. This model is based on prior work [9] and has been verified using the SMM and a finite element model (COMSOL ® 6).…”

Section: Lumped Element Modelmentioning

confidence: 99%

“…Two-dimensional SMM calculations were performed using a Matlab ® R2020a model previously verified against FEM [36,40]. The stiffness matrix K was constructed from the layout, dimensions, and material parameters, with E 0 reduced to model electrostatic detuning.…”

Section: Smm Solvermentioning

confidence: 99%

“…Filters can be electrostatically tuned [15][16][17][18][19], and mechanical coupling between elements can be replaced by electrostatic coupling [20][21][22] or a mixture of the two [23,24]. Methods have been developed to fabricate nanoscale coupling elements [25][26][27][28] and electrode gaps [29][30][31], CMOS integration has been demonstrated [32,33], and alternatives to simple linear arrangements have been proposed [34][35][36][37]. Reviews can be found in [38,39].…”

Section: Introductionmentioning

confidence: 99%

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MEMS Electrostatically Driven Coupled Beam Filter Banks

Syms,

Bouchaala

2023

Micromachines

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MEMS bandpass filters based on electrostatically driven, mechanically coupled beams with in-plane motion have been demonstrated up to the VHF band. Filters higher than second order with parallel plate drives have inherent tuning difficulties, which may be resolved by adding mass-loaded beams to the ends of the array. These beams deflect for DC voltages, and thus allow synchronized electrostatic tuning, but do not respond to in-band AC voltages and hence do not interfere with dynamic synchronization. Additional out-of-band responses may be damped, leaving the desired response. The principle is extended here to close-packed banks of filters, with adjacent arrays sharing mass-loaded beams that localize modes to sub-arrays. The operating principles are explained using a lumped element model (LEM) of the equations of motion in terms of resonant modes and the reflection of acoustic waves at discontinuities. Performance is simulated using the LEM and verified using the more realistic stiffness matrix method (SMM) for banks of up to eight filters. Similar or dissimilar filters may be combined in a compact arrangement, and the method may be extended to higher order resonances and alternative coupled resonator systems.

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Section: Lumped Element Modelmentioning

confidence: 99%

Section: Smm Solvermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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MEMS Electrostatically Driven Coupled Beam Filter Banks

Syms,

Bouchaala

2023

Micromachines

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“…Furthermore, the device wave operating principles can be extended to other metamaterial types, such as elastic or acoustic [54]. In particular, it has already been shown by us that MEMS could be used to generate highperformance two-port notch and comb filters [55]. Once again, wave analysis was used to simplify the coupled dynamical equations.…”

Section: Future Workmentioning

confidence: 99%

High-Performance Magnetoinductive Directional Filters

2022

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Multiport magnetoinductive (MI) devices with directional filter properties are presented. Design equations are developed and solved using wave analysis and dispersion theory, and it is shown that high-performance directional filters can be realised for use both in MI systems with complex, frequency-dependent impedance and in conventional systems with real impedance. Wave analysis is used to reduce the complexity of circuit equations. High-performance MI structures combining directional and infinite rejection filtering are demonstrated, as well as multiple-passband high-rejection filtering. A new method for improving filtering performance through multipath loss compensation is described. Methods for constructing tuneable devices using toroidal ferrite-cored transformers are proposed and demonstrated, and experimental results for tuneable MI directional filters are shown to agree with theoretical models. Limitations are explored, and power handling sufficient for HF RFID applications is demonstrated, despite the use of ferrite materials.

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“…Matching [20], tuning [26][27][28][29][30] and coupling [31][32][33][34][35] can all be performed electrostatically. Alternative designs based on large linear arrays, rings, and 2D and 3D arrays have all been proposed to achieve different filter functionalities [36][37][38][39][40][41][42].…”

Section: Introductionmentioning

confidence: 99%

Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters

Syms

Bouchaala

2021

Micromachines

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Micro-electromechanical systems (MEMS) bandpass filters based on arrays of electrostatically driven coupled beams have been demonstrated at MHz frequencies. High performance follows from the high Q-factor of mechanical resonators, and electrostatic transduction allows tuning, matching and actuation. For high-order filters, there is a conflict between the transduction mechanism and the coupling arrangement needed for dynamic synchronization: it is not possible to achieve synchronization and tuning simultaneously using a single voltage. Here we propose a general solution, based on the addition of mass-loaded beams at the ends of the array. These beams deflect for direct current (DC) voltages, and therefore allow electrostatic tuning, but do not respond to in-band alternating current (AC) voltages and hence do not interfere with synchronization. Spurious modes generated by these beams may be damped, leaving a good approximation to the desired response. The approach is introduced using a lumped element model and verified using stiffness matrix and finite element models for in-plane arrays with parallel plate drives and shown to be tolerant of the exact mass value. The principle may allow compensation of fabrication-induced variations in complex filters.

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New architectures for micromechanical coupled beam array filters

Cited by 6 publications

References 35 publications

MEMS Electrostatically Driven Coupled Beam Filter Banks

MEMS Electrostatically Driven Coupled Beam Filter Banks

High-Performance Magnetoinductive Directional Filters

Mechanical Synchronization of MEMS Electrostatically Driven Coupled Beam Filters

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