Copper oxide (CuO) nanoparticles were prepared by the sol-gel method, by the reaction of copper chloride and ammonium hydroxide as procurers. Nanopowders are annealing at different temperatures (100 °C, 200 °C, and 600 °C) for 120 min and confirmed the monoclinic phase by X-ray diffraction analysis of the metal oxide with lattice parameters a = 4.694 Å, b = 3.456 Å and c = 5.165Å for annealing temperature 400°C. Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM), Fourier Transform Infrared Spectroscopy (FTIR), and UV-Visible Spectroscopy spectrum was used to determine the structure, average crystallize, and morphology. We found increasing in size and energy gap (Eg) from (62.95 nm to 106.84 nm) and from (1.72 eV to 1.49 eV), when annealing temperature increasing from 200 °C to 600 °C, respectively.