New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes

Abstract

This paper reports on new vibrating comb-drive rate gyroscope designs featuring decoupling of the actuation and the detection mode. Analytical calculations as well as FEM and system simulations are carried and the main drawbacks of these sensors are investigated which are especially the fiequency mismatch of the two oscillation modes, the insufficient bandwidth and the effects of levitation. Concepts and simulations of electrostatically controlling both the resonance fiequency and the bandwidth are presented. Within these concepts no mechanical balancing of the devices is required and thus calibration costs are reduced. Simulations of a new quasi-rotating rate gyroscope show, that a resolution of 0.1 "/s is possible at a bandwidth of 50 Hz with 6 mm2 sensor area only and that the effects of levitation are actually compensated.

A Two-Dimensional Electrostatic Model of Interdigitated Comb Drive in Longitudinal Mode

“…The advantages of using electrostatic comb drive actuator approach include low power dissipation, simple electronic control, and easy capacity-based sensing mechanism. These devices are intended for applications in mechanical sensors, RF communication, microbiology, mechanical power transmission, long-range actuation, microphotonics, and microfluids [51,55,38,33].…”

2D16 Analysis on Effects of Design Variable Uncertainty on the Performance of MEMS Gyroscope Based on Sample Statistics

“…Conventional gyroscopes are relatively 1arge and expenstve so that they are not psoper to be used for general mdustrial and household applicattons To overcome such lmiitations, a micro scale wbratmg type gyroscope [1] m which the arigular rate could be obtamed by measurmg the Conolis acceleratron was developed recently In the early 1990's, the advancement of micromachmmg technologies enabled the development of several types of mmiaturized low-eost MEMS gyroscopes hamg much rmproved performances [2][3][4][5] Smce manufacturmg a micro scale product often brmgs about relatively large errors, the performance of the product cannot be guaranteed reliahly [[herefore it is necessary to estimate the uncertainty of the product perfbrmance which is caused by several parameter uncertamties…”

Robust design of a vibratory gyroscope with an unbalanced inner torsion gimbal using axiomatic design

“…The product was limited in size and costly because of the precision manufacturing process. Recently, there has been interest in the applications of silicon-made micro vibratory gyroscopes because the size and cost can be considerably reduced [1][2][3][4]. In spite of the many advantages, it is difficult to maintain precision with the silicon-made gyroscope.…”