Single phase, c-axis oriented, e-doped, Sr 1-x La x CuO 2 thin films were epitaxially grown on KTaO 3 and DyScO 3 substrates by reactive rf sputtering. As-grown films being insulating due to oxygen excess, oxygen reduction is necessary to observe superconductivity. Two different procedures were employed to reach superconductivity.On one hand an in-situ reduction process was conducted on a series of films deposited on both types of substrates. On the other hand, an ex-situ reduction procedure was performed sequentially on a single film deposited on DyScO 3 . The study of the influence of oxygen reduction on the structural and electronic properties of the thin films is presented and discussed.