New inks for the direct drop-on-demand fabrication of polymer lenses

Voigt, Anja; Ostrzinski, Ute; Pfeiffer, K.; Kim, J. Y.; Fakhfouri, V.; Brugger, Jürgen; Gruetzner, G.

doi:10.1016/j.mee.2010.12.004

Cited by 51 publications

(34 citation statements)

References 23 publications

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“…This process can be repeated several times to deposit several polymers into a single stamp (or mould). As a proof of concept we choose an SU-8 epoxy-based ink solution (Ink-Epo_1, Micro Resist Technology GmbH, Germany) optimized to be used in IJP set-ups [12]. After curing this solution results in standard SU-8, which is widely used for polymer MEMS applications and also exhibits convenient optical properties.…”

Section: Technique Descriptionmentioning

confidence: 99%

Heterogeneous material micro-transfer by ink-jet print assisted mould filling

Cadarso

Smolik

Auzelyté

et al. 2012

Microelectronic Engineering

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Section: Technique Descriptionmentioning

confidence: 99%

Heterogeneous material micro-transfer by ink-jet print assisted mould filling

Cadarso

Smolik

Auzelyté

et al. 2012

Microelectronic Engineering

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“…For this reason, various fabrication methods of micro-lens arrays are also researched and developed very eagerly, and new methods are frequently proposed one after another. Representative methods are thermal reflow of resist or plastic materials [13,14], etching of glass or plastic materials [15,16], ink-jetting of lens materials [17,18], tracking of laser light [19,20], gray scale lithography [21,22], and embossing [23,24]. What fabrication method is appropriate depends on the applications or necessary lens parameters and sizes.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Concave Resist Patterns for the Use of Reversal Molds of High-Density Micro-Lens Arrays

Horiuchi

Sasaki

2016

J. Photopol. Sci. Technol.

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Almost spherical concave resist patterns in a dense array were fabricated to be used as reversal molds of plastic convex micro-lens arrays. In the past research, such micro-lens arrays were replicated using concave metal molds fabricated by replicating original convex resist patterns. However, it was difficult to fabricate the original convex resist patterns densely in a matrix. In addition, because two replication processes from resist to metal and from metal to plastic resin were necessary, procedures were very complicated, and it took long times for obtaining final plastic resin lens arrays. In the new method, original concave mold patterns were obtained by simple 1/19 projection-exposure lithography including only one exposure and one development by applying largely defocused exposure intentionally. Despite the simplicity, very wide-range curvature radiuses of 25-120 μm were obtained by giving various exposure doses even using reticles with same 500-μm transparent square patterns. It was basically checked that epoxy resin lens arrays were obtained by mechanically separating them from the concave resist molds.

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“…It has already been successfully used for a broad range of applications, such as among others, micro cantilevers [2], micro-optics [3], for microcapsule fabrication [4], as master for PDMS-based microfluidic setups [5], or as stamps for bio-medical purposes [6]. SU-8 and its derivatives can be prototyped by several methods, such as UV photolithography [7], two-photon polymerization [8], laser writing [9], inkjet printing (IJP) [10], or a combination of those technologies [11].…”

Section: Introductionmentioning

confidence: 99%

Inkjet Printing of High Aspect Ratio Superparamagnetic SU-8 Microstructures with Preferential Magnetic Directions

et al. 2014

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Structuring SU-8 based superparamagnetic polymer composite (SPMPC) containing Fe 3 O 4 nanoparticles by photolithography is limited in thickness due to light absorption by the nanoparticles. Hence, obtaining thicker structures requires alternative processing techniques. This paper presents a method based on inkjet printing and thermal curing for the fabrication of much thicker hemispherical microstructures of SPMPC. The OPEN ACCESSMicromachines 2014, 5 584 microstructures are fabricated by inkjet printing the nanoparticle-doped SU-8 onto flat substrates functionalized to reduce the surface energy and thus the wetting. The thickness and the aspect ratio of the printed structures are further increased by printing the composite onto substrates with confinement pedestals. Fully crosslinked microstructures with a thickness up to 88.8 μm and edge angle of 112° ± 4° are obtained. Manipulation of the microstructures by an external field is enabled by creating lines of densely aggregated nanoparticles inside the composite. To this end, the printed microstructures are placed within an external magnetic field directly before crosslinking inducing the aggregation of dense Fe 3 O 4 nanoparticle lines with in-plane and out-of-plane directions.

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New inks for the direct drop-on-demand fabrication of polymer lenses

Cited by 51 publications

References 23 publications

Heterogeneous material micro-transfer by ink-jet print assisted mould filling

Heterogeneous material micro-transfer by ink-jet print assisted mould filling

Fabrication of Concave Resist Patterns for the Use of Reversal Molds of High-Density Micro-Lens Arrays

Inkjet Printing of High Aspect Ratio Superparamagnetic SU-8 Microstructures with Preferential Magnetic Directions

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