2003
DOI: 10.1002/mop.11270
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New micromachined microstrip transmission lines for application in millimeter‐wave circuits

Abstract: In this paper, we describe a new GaAs‐based micromachined microstrip line, supported by an electrically supported air‐gapped microstrip line (DAML) structure and developed using RF MEMS techniques to achieve low losses at millimeter‐wave frequency bands with wide impedance ranges. The measured DAML with a 10‐μm post height shows less than 1.5‐dB/cm attenuation at 50 GHz with 20–100Ω, which agrees well with the simulated results. © 2004 Wiley Periodicals, Inc. Microwave Opt Technol Lett 40: 6–9, 2004; Published… Show more

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Cited by 14 publications
(5 citation statements)
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“…This reduced monopole length is due to the wide width used for the metal-plate monopole (when unfolded into a planar structure, the metal-plate monopole has a total width of 20 mm). In addition, given the wide width, the proposed antenna can provide broadband operation similar to the broadband characteristics of conventional planar monopole antennas [5][6][7]. However, in order to place the proposed monopole antenna along the narrow space (usually with a width of about 10 mm only) between the display and the casing of the laptop, and to reduce the coupling effects …”
Section: Antenna Designmentioning
confidence: 97%
See 1 more Smart Citation
“…This reduced monopole length is due to the wide width used for the metal-plate monopole (when unfolded into a planar structure, the metal-plate monopole has a total width of 20 mm). In addition, given the wide width, the proposed antenna can provide broadband operation similar to the broadband characteristics of conventional planar monopole antennas [5][6][7]. However, in order to place the proposed monopole antenna along the narrow space (usually with a width of about 10 mm only) between the display and the casing of the laptop, and to reduce the coupling effects …”
Section: Antenna Designmentioning
confidence: 97%
“…However, the proposed transmission-line structures have a better advantage with regard to the loss characteristic at high frequency than conventional transmission lines, while the latter have the structural disadvantage of a very complex process and are not compatible with conventional MMIC fabrication technology. Recently, we proposed new dielectricsupported air-gapped microstriplines structures (DAMLs), in which the signal lines were elevated from the ground plates, in order to be compatible with conventional MMIC fabrication technology and obtain low losses at the millimeter-wave frequency band with a wide impedance range [5].…”
Section: Introductionmentioning
confidence: 99%
“…Problems such as high dielectric loss, low isolation, and low coupling commonly limit the performance of planar transmission lines in microwave integrated circuits [4,5]. "RF MEMS" is a field dedicated to the construction of microwave devices using micromachining techniques, and there has been extensive research done on micromachined transmission lines [5,6,7,8,9,10,11]. ARCL is a 3D radio frequency transmission technology based on MEMS surface micromachining technology.…”
Section: Introductionmentioning
confidence: 99%
“…Multilayer microstrip line is an another approach in which low dielectric constant polyimide is used as a buffer between the line and the substrate and this reduces dissipation loss, whereas in Reference , the microstrip line is in air supported by a dielectric and is termed as dielectrically supported air‐gapped microstrip line.…”
Section: Introductionmentioning
confidence: 99%