New spectrometer for non-medical high-precision frequency domain optical coherence tomography

Abstract

We present a novel cost-effective high spectral resolution and small bandwidth spectrometer for the fiber optic frequency domain optical coherence tomography (FD-OCT) for thin wafer semiconductor applications. The spectrometer employs achromatic dispersive optics. We also present a novel method for calibration of this narrow bandwidth spectrometer using a fiber optic Michelson interferometer.