New target materials for innovative applications on glass

Matthews, Steven; Bosscher, Veerle De; Blondeel, Anja; Holsbeke, John Van; Delrue, H

doi:10.1016/j.vacuum.2008.04.065

Cited by 19 publications

(9 citation statements)

References 2 publications

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“…Thus, the electric conductivity of the film is enhanced. 14) When applied to gas sensors, gas detection becomes possible even at lower driving voltage, and response time becomes much quicker. To confirm the gas detection performance per Al doping, RF magnetron sputter was used to deposit a 200-nm-thick AZO film on Si wafer.…”

Section: Resultsmentioning

confidence: 99%

CO Gas Detection of Al-Doped ZnO Nanostructures with Various Shapes

Wang

Lim

2013

Jpn. J. Appl. Phys.

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Nanostructure of semiconductor type gas sensors that are high sensitivity, fast response time, inexpensive, and easily fabricated, is suggested. One-dimensional (1D) nanostructures, such as nanorods, and hollow spheres, are attracting particularly great interest because of their large specific surface area and their inherent physical properties. This study combined with ZnCl 2 (6.95 g, Sigma-Aldrich), Al(NO 3 ) 3 Á 9H 2 O (Junsei), NaOH, ethanol, and deionized water (DI) by hydrothermal synthesis to manufacture, spherical, hollow, hierarchical, and nanorod. The same Aldoped ZnO (AZO) were prepared by a colloidal template on a Si wafer to make a 3D igloo structure as well. Sensitivity to carbon monoxide at 50 ppm was tested at 250 C the compare the sensing properties. Gas sensitivity of the hierarchical structure showed the highest sensitivity at 31.8, a figure 7 times that of the packed spherical sphere, whereas the igloo structure gave the fastest response speed of 32 s. The results of various shapes of the AZO nanostructures demonstrated high sensitivity and quick response time, which is useful in the detection of harmful gases in automobiles and the atmosphere. #

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Section: Resultsmentioning

confidence: 99%

CO Gas Detection of Al-Doped ZnO Nanostructures with Various Shapes

Wang

Lim

2013

Jpn. J. Appl. Phys.

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“…The low utilization rate of target materials leads to the generation of a large amount of waste target material. [6][7][8] Today, as natural resources become increasingly depleted, the recovery of indium from secondary materials is becoming increasingly important. Waste ITO targets are one of the promising secondary resources, and the recovery of its indium resources is of great significance.…”

Section: Introductionmentioning

confidence: 99%

Efficient recovery of indium from waste indium tin oxide (ITO) targets by pressure leaching with sulfuric acid

Pu,

Zhang,

Zhou

et al. 2023

React. Chem. Eng.

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“…When ITO targets are sputtered on glass panels, less than 30% of the indium is deposited on the substrate. The balance of about 70% stays in the remained ITO targets or forms a thin layer on the shields of the sputtering chambers [6]. Indium-containing scraps such as used targets and grinding sludge from the shields are, thus, considered as an attractive secondary resource.…”

Section: Introductionmentioning

confidence: 99%

Recycling of the indium scrap from ITO sputtering waste

2010

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Indium components have been successfully recovered from indiumcontaining scrap powders collected by the sand-blasting of sputtering chamber walls. A two-step air-classifier was used for the classification of the scrap powder. The raw scrap powders containing 10 wt% indium were classified into 12 lots according to the revolutions per minute of a classifying wheel: 6,000, 8,000, 10,000, and 12,000 rpm. The enrichment of indium component was possible in fine overflow fraction, that is, the third classified fractions at all wheel speeds, while the indium components were not concentrated in the first classified fraction. The grade of the indium components became higher with decreasing particle size and the highest grade was obtained in the third classified fraction. The purity of the indium component improved to 17.4 wt% and the recovery of the indium component was in the range 94.2-96.2% for the second and third classified fractions. The recovery and enrichment of indium should be optimized for the maximum recycling of the indium components, which can be used as raw materials in the subsequent electro-refining processes.

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New target materials for innovative applications on glass

Cited by 19 publications

References 2 publications

CO Gas Detection of Al-Doped ZnO Nanostructures with Various Shapes

CO Gas Detection of Al-Doped ZnO Nanostructures with Various Shapes

Efficient recovery of indium from waste indium tin oxide (ITO) targets by pressure leaching with sulfuric acid

Recycling of the indium scrap from ITO sputtering waste

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