2004
DOI: 10.1109/jmems.2004.828740
|View full text |Cite
|
Sign up to set email alerts
|

New thermoelectric components using microsystem technologies

Abstract: This paper describes the first thermoelectric devices based on the V-VI-compounds Bi/sub 2/Te/sub 3/ and (Bi,Sb)/sub 2/Te/sub 3/ which can be manufactured by means of regular thin film technology in combination with microsystem technology. Fabrication concept, material deposition for some 10-/spl mu/m-thick layers and the properties of the deposited thermoelectric materials will be reported. First device properties for Peltier-coolers and thermogenerators will be shown as well as investigations on long term an… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

5
193
0
1

Year Published

2008
2008
2018
2018

Publication Types

Select...
5
4

Relationship

0
9

Authors

Journals

citations
Cited by 352 publications
(199 citation statements)
references
References 9 publications
5
193
0
1
Order By: Relevance
“…To date, many thin-film thermoelectric devices have been fabricated using various film deposition methods such as flash evaporation [12][13][14], sputtering [15][16][17], and electrodeposition [18,19]. In addition, thin-film thermoelectric materials possess favorable features not exhibited by bulk materials.…”
Section: Introductionmentioning
confidence: 99%
“…To date, many thin-film thermoelectric devices have been fabricated using various film deposition methods such as flash evaporation [12][13][14], sputtering [15][16][17], and electrodeposition [18,19]. In addition, thin-film thermoelectric materials possess favorable features not exhibited by bulk materials.…”
Section: Introductionmentioning
confidence: 99%
“…However, the use of the reversible thermoelectric effect (i.e., transforming thermal energy directly into electrical energy) (Seebeck Effect) had still not been explored much for the purposes of electric energy generation, as shown in [13][14][15]; in this way, the proposed device provided a valuable contribution to the implementation of this new technology.…”
Section: Resultsmentioning
confidence: 99%
“…This new technology includes the development of thermoelectric materials and applied systems, for instance, the wall of conventional furnaces, cooling of heat pipes, devices based on structured deposed, turbo compounding, Rankine and Brayton electric utilities, thermochemical recuperation, in-cylinder waste heat recovery, and improvement of cogeneration systems; which are all used for energy harvest using solid state thermoelectric devices [4][5][6][7][8][9][10][11][12][13][14][15]. The use of thermoelectric generation brings certain advantages, such as high durability, high precision, and reduced size, besides being an excellent way of collecting residual thermal energy, which means it is a clean energy cogeneration [16][17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%
“…Devices with direct contact to the human body can harvest the energy radiated from the human body by means of thermo generators (TEGs) [12]. To address the needs of telecommunications and other embedded applications, design of micro structured thermoelectric devices has been proposed in [13]. There are also commercially available sensor nodes developed by Microstrain [14] which rely on ambient energy harvesting for power.…”
Section: Design Of Energy Harvesting Sensor Nodementioning
confidence: 99%