NF3 decomposition behind shock waves in the intermediate pressure range

Kudriavtsev, N. N.; Sukhov, A. M.; Shamshev, D.P.

doi:10.1016/0009-2614(92)80103-i

Cited by 4 publications

(2 citation statements)

References 6 publications

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“…However, the following mechanisms seem to be more plausible for dry gas atmosphere without oxygen in the present experiment [14][15][16]: On the other hand, more reasonably comparable example was studied by Campa et al [18] who fabricated and character-ized Cu-Na-MOR catalyst where catalytic decomposition of N 2 O (g) at 500°C is explained by oxidation number of copper and reaction intermediate of adsorbed Oradical:…”

Section: Resultssupporting

confidence: 60%

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Archives of Metallurgy and Materials

Seo,

Lee,

Cho

et al. 2019

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Mordenite-zeolite supported Ca-Cu and Ba-Cu catalysts (Ca-Cu/MOR and Ba-Cu MOR) were successfully fabricated for direct decomposition of both NF 3 and N 2 O gases contained in waste gas stream of (semiconductor) electronics industry. N 2 O conversion rates of Ca-Cu and Ba-Cu catalysts were 79 and 86%, respectively, at 700°C and 1 atm under space velocity of 5000 h -1 . The Ca-Cu catalyst was especially noteworthy in that its capability of converting N 2 O could be maintained even after its exposure to co-feeding NF 3 gas constituent in the waste gas stream. Compositional and surface morphological analyses of the Ca-Cu and Ba-Cu catalysts were made before and after exposure to the waste gas stream to examine any noticeable degradation or change of the catalysts. Unlike Ba-Cu catalyst, SiO 2 constituent of the Ca-Cu catalyst was found to remain immune to the NF 3 -cofeeding waste gas stream, casting a positive prospect for superior and steady N 2 O decomposition performance via maintenance of its structural integrity.

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Section: Resultssupporting

confidence: 60%

“…As for mechanisms for catalytic conversion of NF 3 and N 2 O, mechanistic experiments were not performed in the present research but previous literature were comprehensibly reviewed [13][14][15][16][17][18], where various intermediate reaction mechanisms were suggested for different experimental apparatus, procedure and environment.…”

Section: Resultsmentioning

confidence: 99%

Archives of Metallurgy and Materials

Seo,

Lee,

Cho

et al. 2019

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Photoreduction of nitrogen trifluoride with controlled release of radicals

Liu

Zhang

et al. 2013

J of Chemical Tech & Biotech

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BACKGROUND: With the rapid growth of the semiconductor and thin film transistor liquid crystal display manufacturing industries, large quantities of the potent greenhouse gas nitrogen trifluoride (NF 3 ) is in demand. But perfluorocarbons are very stable compounds because of their molecular structures. Therefore, in the atmosphere, NF 3 is difficult to oxidize by O 3 , NO, NO 2 , and OH radicals, except by excited oxygen atoms O( 1 D) that can react with it to form NF 2 or other products. In this study the possible degradation process of NF 3 in the 'controlled release of radicals' reactor is discussed.

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Effects of experimental parameters on NF3 decomposition fraction in an oxygen-based RF plasma environment

Wang

Shih

et al. 2004

Chemosphere

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NF3 decomposition behind shock waves in the intermediate pressure range

Cited by 4 publications

References 6 publications

Archives of Metallurgy and Materials

Archives of Metallurgy and Materials

Photoreduction of nitrogen trifluoride with controlled release of radicals

Effects of experimental parameters on NF3 decomposition fraction in an oxygen-based RF plasma environment

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