2019
DOI: 10.3390/nano9121732
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NH3-Sensing Mechanism Using Surface Acoustic Wave Sensor with AlO(OH) Film

Abstract: In this study, AlO(OH) (boehmite) film was deposited onto a surface acoustic wave (SAW) resonator using a combined sol-gel and spin-coating technology, and prepared and used as a sensitive layer for a high-performance ammonia sensor. The prepared AlO(OH) film has a mesoporous structure and a good affinity to NH3 (ammonia gas) molecules, and thus can selectively adsorb and react with NH3. When exposed to ammonia gases, the SAW sensor shows an initial positive response of the frequency shift, and then a slight d… Show more

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Cited by 17 publications
(9 citation statements)
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“…Ammonia is a harmful gas and environmental pollutant, (1,2) and the atmospheric concentration of ammonia is gradually increasing due to a wide range of human activities, which include agriculture and the manufacturing of electronics and chemicals. (3,4) The lower limit of human olfactory perception of ammonia is about 50 ppm, and the respiratory system, eyes, and skin are damaged when the ammonia concentration is over 500 ppm.…”
Section: Introductionmentioning
confidence: 99%
“…Ammonia is a harmful gas and environmental pollutant, (1,2) and the atmospheric concentration of ammonia is gradually increasing due to a wide range of human activities, which include agriculture and the manufacturing of electronics and chemicals. (3,4) The lower limit of human olfactory perception of ammonia is about 50 ppm, and the respiratory system, eyes, and skin are damaged when the ammonia concentration is over 500 ppm.…”
Section: Introductionmentioning
confidence: 99%
“…The frequency variation for 5–50 ppm NH 3 gas is shown in Table 2 for sensor−3, from which the sensitivity was calculated to be 4878 Hz/ppm. Compared with other works in the literature, this study showed an excellent sensitivity performance [ 34 , 35 , 36 , 37 , 38 ], as shown in Table 3 .…”
Section: Resultsmentioning
confidence: 52%
“…The presence of the hydroxyl group was further confirmed in the FTIR and XPS results. Moreover, the physically adsorbed hydroxyl group amplifies the adsorption of gas molecules . However, beyond 78% relative humidity, the sensor’s response decreases, indicating that the continuous moisture layer completely occupies the active sites of the MoS 2 surface, resulting in a water-poisoning effect …”
Section: Resultsmentioning
confidence: 99%