Ni–Ag thin films as strain-sensitive materials for piezoresistive sensors

Chiriac, H.; Urse, M.; Rusu, F.; Hison, C.; Neagu, Maria

doi:10.1016/s0924-4247(99)00027-8

Cited by 35 publications

(20 citation statements)

References 6 publications

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“…The corresponding piezoresistance gauge factor is 6.1, which is much better than that of conventional strain gauges based on metal alloys. 18,24 In summary, we have demonstrated a promising route to synthesize and transfer wafer scale graphene films that are highly conducting and transparent. Developing scalable, high-throughput transfer methods of graphene films from as-grown rigid substrate to more useful, large area flexible/ stretchable substrates would realize the practical use of graphene transparent electrodes for optoelectronic applications such as solar cells, touch sensors, and related flexible electronics in the future.…”

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confidence: 99%

Wafer-Scale Synthesis and Transfer of Graphene Films

Lee

Bae

Jang³

et al. 2010

Nano Lett.

1,068

709

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We developed means to produce wafer scale, high-quality graphene films as large as 3 in. wafer size on Ni and Cu films under ambient pressure and transfer them onto arbitrary substrates through instantaneous etching of metal layers. We also demonstrated the applications of the large-area graphene films for the batch fabrication of field-effect transistor (FET) arrays and stretchable strain gauges showing extraordinary performances. Transistors showed the hole and electron mobilities of the device of 1100 +/- 70 and 550 +/- 50 cm(2)/(V s) at drain bias of -0.75 V, respectively. The piezo-resistance gauge factor of strain sensor was approximately 6.1. These methods represent a significant step toward the realization of graphene devices in wafer scale as well as application in optoelectronics, flexible and stretchable electronics.

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confidence: 99%

Wafer-Scale Synthesis and Transfer of Graphene Films

Lee

Bae

Jang³

et al. 2010

Nano Lett.

1,068

709

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“…This resistance sensitivity to strain makes the cracked Ti film on PDMS substrate applicable to a strain sensor that can operate in the high- and broad-strain range. In this case, the sample gives the normalized resistance change to the unit strain change (so-called gauge factor), ∆ R /( R 0 · ∆ ϵ ) = 2.0, which is comparable to the values of conventionally used metals such as Cu, constantan, and Ag [10,25,26]. In contrast to the conventional strain-sensing materials of which ultimate strain is limited to <1%, the cracked Ti film on the elastomeric substrate shows much higher strain tolerances up to 50% and a broader sensing range of 30 to 50%.…”

Section: Resultsmentioning

confidence: 86%

Cracked titanium film on an elastomeric substrate for highly flexible, transparent, and low-power strain sensors

Noh

2013

Nanoscale Res Lett

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Strain-dependent cracking behaviors in thin titanium (Ti) films on polydimethylsiloxane (PDMS) substrates were systematically investigated for their application to sensitive, flexible, transparent, and portable strain sensors. When uniaxially elongated, vertical cracks were developed in the low-strain range, and beyond a critical strain, tilted cracks appeared to intersect the vertical cracks. The cracking behaviors were also dependent on Ti film thickness. The varying strain-dependent crack patterns produced a significant resistance change in response to the applied strain, particularly, in the high- and broad-strain range. For a 180-nm-thick Ti film on PDMS substrate, a gauge factor of 2 was achieved in the range of 30% to 50% strain. The operation power was extremely low. All the Ti films on PDMS substrates were transparent, highly flexible, and very easy to fabricate. These results suggest that cracked Ti films on PDMS substrates could be a viable candidate for realizing a low-cost, flexible, transparent, and portable strain sensor.

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“…Chiriac et al [1999] describe the strain sensitivity for materials which have electromechanical properties. The strain sensitivity is evaluated by using a dimension less parameter, k, which is called the gauge factor.…”

Section: A Distribution/availability Statementmentioning

confidence: 99%

The Use MEMS to Detect Vibrations Associated With Abnormal Scroll Compressor Operation

Roman¹

2000

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Ni–Ag thin films as strain-sensitive materials for piezoresistive sensors

Cited by 35 publications

References 6 publications

Wafer-Scale Synthesis and Transfer of Graphene Films

Wafer-Scale Synthesis and Transfer of Graphene Films

Cracked titanium film on an elastomeric substrate for highly flexible, transparent, and low-power strain sensors

The Use MEMS to Detect Vibrations Associated With Abnormal Scroll Compressor Operation

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