Nicotinic acid as a novel inhibitor for alkaline cobalt CMP: Experiment and molecular simulation

Ma, Boao; Zhang, Shihao; Tan, Baimei; Li, Wei; Wang, Yazhen; Sun, Xiaoqin

doi:10.1016/j.colsurfa.2022.129816

Cited by 13 publications

(2 citation statements)

References 42 publications

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“…52 Subsequently, the absolute electronegativity (χ) and overall hardness (η) were determined by utilizing the first vertical ionization energy and electron density of the chemical substance. 15 Finally, the electron transfer fraction (ΔN) between the Fmoc-Met-OH molecule and Cu surface was estimated. The equations for calculation, along with their corresponding results, have been delineated in Table IV.…”

Section: = ( ) [ ] Zmentioning

confidence: 99%

“…The density functional theory (DFT) and molecular dynamics (MD) have been used as significant means of investigating molecular chemical activity and adsorption energy, which apply first-principles calculations and simulations to reveal the microscopic mechanisms involved in chemical reactions, thus providing new perspectives on chemical research. [14][15][16] Zhang et al 17 studied the corrosion inhibition of carbon steel by L-methionine (MIT) and its derivatives in an acidic solution and described the atomic-level inhibition mechanism on the Fe (110) substrate in combination with chemical experimental analysis and MD simulations. At the same time, Zhang et al 18 also employed quantum chemical calculation and dynamic simulation to compare the inhibition capabilities of Met and proline (Pro) on carbon steel.…”

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confidence: 99%

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Surface Interaction Effect and Mechanism of Methionine Derivatives as Novel Inhibitors for Alkaline Copper CMP: Insights from Molecular Simulation and Experimental Analysis

Zhan,

Niu,

Liu

et al. 2023

ECS J. Solid State Sci. Technol.

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To prevent excessive corrosion caused by the slurry in the copper (Cu) chemical mechanical polishing (CMP) process, a corrosion inhibitor is normally required. In this study, the methionine (Met) derivative FMOC-L-Methionine (Fmoc-Met-OH) was explored as a corrosion inhibitor for Cu film CMP in weak alkaline conditions (pH = 8.5). A comprehensive evaluation was conducted to confirm the efficiency of Fmoc-Met-OH as a corrosion inhibitor, combining experiments and theoretical calculations. The results showed that Fmoc-Met-OH could effectively inhibit the corrosion of Cu, with a high inhibition efficiency (IE) of 78.26% while maintaining a high removal rate (RR) of 5703 Å min−1, a low static etch rate (SER) of 676 Å min−1, and a low surface root mean square deviation (Sq) of 1.41 nm. Simultaneously, the results of X-ray photoelectron spectroscopy (XPS) tests and electrochemical analysis confirm that Fmoc-Met-OH molecules can form a dense and ordered adsorption film on the Cu surface. According to the density functional theory (DFT) calculations and molecular dynamics (MD) simulation, it was verified that Fmoc-Met-OH exhibited strong chemical adsorption on Cu substrates, as evidenced by the high binding energy (E Binding) value, low energy gap (ΔE), and radial distribution function (RDF) analysis. The findings provided theoretical evidence of the better inhibition effectiveness of Fmoc-Met-OH at a molecular or atomic level.

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Section: = ( ) [ ] Zmentioning

confidence: 99%

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confidence: 99%

Surface Interaction Effect and Mechanism of Methionine Derivatives as Novel Inhibitors for Alkaline Copper CMP: Insights from Molecular Simulation and Experimental Analysis

Zhan,

Niu,

Liu

et al. 2023

ECS J. Solid State Sci. Technol.

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Drivers and Pathways for the Recovery of Critical Metals from Waste‐Printed Circuit Boards

Xia,

Lee,

Charpentier

et al. 2024

Advanced Science

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The ever‐increasing importance of critical metals (CMs) in modern society underscores their resource security and circularity. Waste‐printed circuit boards (WPCBs) are particularly attractive reservoirs of CMs due to their gamut CM embedding and ubiquitous presence. However, the recovery of most CMs is out of reach from current metal‐centric recycling industries, resulting in a flood loss of refined CMs. Here, 41 types of such spent CMs are identified. To deliver a higher level of CM sustainability, this work provides an insightful overview of paradigm‐shifting pathways for CM recovery from WPCBs that have been developed in recent years. As a crucial starting entropy‐decreasing step, various strategies of metal enrichment are compared, and the deployment of artificial intelligence (AI) and hyperspectral sensing is highlighted. Then, tailored metal recycling schemes are presented for the platinum group, rare earth, and refractory metals, with emphasis on greener metallurgical methods contributing to transforming CMs into marketable products. In addition, due to the vital nexus of CMs between the environment and energy sectors, the upcycling of CMs into electro‐/photo‐chemical catalysts for green fuel synthesis is proposed to extend the recycling chain. Finally, the challenges and outlook on this all‐round upgrading of WPCB recycling are outlined.

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Polishing mechanisms of various surfactants in chemical mechanical polishing relevant to cobalt interconnects

Zhang,

Wang,

Wang

et al. 2023

Int J Adv Manuf Technol

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Nicotinic acid as a novel inhibitor for alkaline cobalt CMP: Experiment and molecular simulation

Cited by 13 publications

References 42 publications

Surface Interaction Effect and Mechanism of Methionine Derivatives as Novel Inhibitors for Alkaline Copper CMP: Insights from Molecular Simulation and Experimental Analysis

Surface Interaction Effect and Mechanism of Methionine Derivatives as Novel Inhibitors for Alkaline Copper CMP: Insights from Molecular Simulation and Experimental Analysis

Drivers and Pathways for the Recovery of Critical Metals from Waste‐Printed Circuit Boards

Polishing mechanisms of various surfactants in chemical mechanical polishing relevant to cobalt interconnects

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