2019
DOI: 10.3390/coatings9070417
|View full text |Cite
|
Sign up to set email alerts
|

Niobium-Containing DLC Coatings on Various Substrates for Strain Gauges

Abstract: Niobium-containing diamond-like carbon films (a-C:H:Nb) were deposited in a hybrid plasma-enhanced chemical vapor deposition (PECVD) and direct-current magnetron sputtering (DCMS) process, using a niobium target in an argon/acetylene atmosphere on industrial polyimide foil, spin-coated polyimide foil, and alumina substrates. While the coating on the industrial foil tends to crack, the thin films on the spin-coated polyimide and the ceramic substrates showed good adhesion, as well as a smooth and dense topograp… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2020
2020
2023
2023

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(1 citation statement)
references
References 25 publications
(32 reference statements)
0
1
0
Order By: Relevance
“…However, in this work, the sp 3 content is monotonously increased with increasing CH 4 flow rate by XPS and Raman analysis, while the hardness is firstly decreased and then slightly increased, which implies that the sp 3 content cannot be used to explain the change of hardness in this work. As a matter of fact, initial decrease in hardness should be attributed to the decreases in the Si-C bonds due to the decrease of Si content, because hard SiC nanoparticles doping into DLC matrix plays a dominant role in the solid solution hardening effect [44]. Moreover, a slight increase in hardness with the increase of CH 4 flow rate from 60 to 150 sccm is also ascribed to the formation of Si-C bonds, because the Si-C formation can hinder the continuity of carbon network, and thus resulting in the decrease of hardness.…”
Section: Mechanical Propertiesmentioning
confidence: 99%
“…However, in this work, the sp 3 content is monotonously increased with increasing CH 4 flow rate by XPS and Raman analysis, while the hardness is firstly decreased and then slightly increased, which implies that the sp 3 content cannot be used to explain the change of hardness in this work. As a matter of fact, initial decrease in hardness should be attributed to the decreases in the Si-C bonds due to the decrease of Si content, because hard SiC nanoparticles doping into DLC matrix plays a dominant role in the solid solution hardening effect [44]. Moreover, a slight increase in hardness with the increase of CH 4 flow rate from 60 to 150 sccm is also ascribed to the formation of Si-C bonds, because the Si-C formation can hinder the continuity of carbon network, and thus resulting in the decrease of hardness.…”
Section: Mechanical Propertiesmentioning
confidence: 99%