Nitride passivation of the interface between high-k dielectrics and SiGe

Sardashti, Kasra; Hu, Kai-Ting; Tang, Kechao; Madisetti, Shailesh; McIntyre, Paul C.; Oktyabrsky, S.; Siddiqui, Shariq; Sahu, Bhagawan; Yoshida, N.; Kachian, Jessica S.; Dong, Lin; Frühberger, Bernd; Kummel, Andrew C.

doi:10.1063/1.4939460

Cited by 38 publications

(12 citation statements)

References 24 publications

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“…The results obtained are displayed in Figure d. Suboxides (GeO) resulting from the partial reduction of the fiber surface during the heat treatment upon inert atmosphere, and nitrogen‐containing Ge species (GeO x N y ) are present (at 31.6 and 32.7 eV BE, respectively) in all the investigated samples, with the percentage of GeO strongly increasing with T C at any w G . Conversely, the germanium dioxide contribution (at 33.4 eV) decreases up to vanish at 700 °C for higher w G values.…”

Section: Resultsmentioning

confidence: 94%

Are Electrospun Fibrous Membranes Relevant Electrode Materials for Li‐Ion Batteries? The Case of the C/Ge/GeO₂ Composite Fibers

Pantò

Fan

Stelitano

et al. 2018

Adv Funct Materials

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Self-supporting paper-like membranes consisting of carbon/germanium dioxide (C/GeO 2 ) fibers are prepared via electrospinning of solutions with different germanium load (2.50−4.25 wt%), followed by carbonization at 550−700 °C, and are evaluated as anode materials in lithium ion batteries. The investigation of the physicochemical properties of the membranes by several characterization techniques shows that, as expected, with increasing carbonization temperature better graphitized and less nitrogen-rich C fibers are obtained, containing Ge 0 and/or reduced oxide phases along with GeO 2 nanoparticles. These characteristics, combined with the cold pressing of the as-spun membrane that noticeably reduces the hollow space within the fibres giving rise to a more compact and tight structure, lead to initial discharge volumetric capacities (≈1390-3580 mAh cm −3 ) much higher than commercial graphite anodes. In particular, the membrane prepared from solution with 4.25 wt% Ge-load by cold-pressing and carbonization at 700 °C, is able to deliver ≈1500 mAh cm −3 after 50 cycles at 50 mA g −1 with a Coulombic efficiency close to 100%. Nevertheless, the anodes exhibit poor rate capability. This is because the carbonization at high temperature promotes outward diffusion and subsequent coalescence of Ge-clusters in larger particles, with the structure of the fibers made fragile by the formation of voids within them.promoted the search for clean renewable energy sources. However, the intermittent nature of these sources calls for the use of efficient energy storage systems. The requirements that electrochemical energy storage devices, ranging from coin cells to large-scale energy storage systems, have to meet are ever increasing. They include high energy density, long durability, low costs, and eco-friendliness. For this reason, the advanced research on electrode materials is continuously progressing.To date, lithium-ion batteries (LIBs) represent the most popular energy storage systems, widely utilized to power small/ portable electronic devices, as well as hybrid and fully electric vehicles. The gravimetric capacity (372 mAh g −1 ) of the commonly used graphite anodes is inadequate to meet the current requirements for energy storage systems. In the search for alternative anodes materials, the focus is mainly on transition metal oxides MO x , [1][2][3][4][5][6] which store Li + ions through the conversion reaction MO x + 2x Li + + 2xe − ↔ M 0 +xLi 2 O, and IV group elements M 0 [7][8][9] that are able to store larger amount of Li + ions through the alloying reaction M 0 + yLi + + ye − ↔ Li y M. [10] Among the latter, germanium is the one endowed with by far superior properties (higher Li diffusivity and electronic conductivity, and smaller volume changes suffered during lithiation/delithiation Electrode Materials

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Section: Resultsmentioning

confidence: 94%

Are Electrospun Fibrous Membranes Relevant Electrode Materials for Li‐Ion Batteries? The Case of the C/Ge/GeO₂ Composite Fibers

Pantò

Fan

Stelitano

et al. 2018

Adv Funct Materials

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“…In addition, NH 3 is usually used instead of N 2 as a reactant because NH 3 has lower bond energy. Plasma nitriding has two main types: direct nitriding of the SiGe material and deposition of a high-Ä material and then nitriding [97] . Although the plasma nitriding process after the deposition of high-Ä materials with relatively low temperature can obtain a better interface in planar devices, it is difficult to guarantee the uniformity of passivation through the plasma passivation method for multi-gate devices such as FinFETs or stacked nanosheets.…”

Section: Passivationmentioning

confidence: 99%

Advanced process and electron device technology

Zhang¹,

Su²,

Chang³

et al. 2022

Tsinghua Sci. Technol.

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This article reviews advanced process and electron device technology of integrated circuits, including recent featuring progress and potential solutions for future development. In 5 years, for pushing the performance of fin field-effect transistors (FinFET) to its limitations, several processes and device boosters are provided. Then, the three-dimensional (3D) integration schemes with alternative materials and device architectures will pave paths for future technology evolution. Finally, it could be concluded that Moore's law will undoubtedly continue in the next 15 years.

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“…To control the interface quality, many methods have been extensively explored, such as plasma (N 2 or NH 3 ) nitridation passivation [ 4 , 5 ], sulfur passivation [ 6 ], thermal oxidation [ 7 , 8 ], low-temperature ozone passivation [ 9 , 10 , 11 , 12 ] and Si-cap passivation [ 13 ]. Among them, low-temperature ozone passivation with low thermal budge and Si-cap passivation with excellent properties of interface are considered the most promising passivation methods.…”

Section: Introductionmentioning

confidence: 99%

Investigate on the Mechanism of HfO2/Si0.7Ge0.3 Interface Passivation Based on Low-Temperature Ozone Oxidation and Si-Cap Methods

Yao

Wang

et al. 2021

Nanomaterials

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The interface passivation of the HfO2/Si0.7Ge0.3 stack is systematically investigated based on low-temperature ozone oxidation and Si-cap methods. Compared with the Al2O3/Si0.7Ge0.3 stack, the dispersive feature and interface state density (Dit) of the HfO2/Si0.7Ge0.3 stack MOS (Metal-Oxide-Semiconductor) capacitor under ozone direct oxidation (pre-O sample) increases obviously. This is because the tiny amounts of GeOx in the formed interlayer (IL) oxide layer are more likely to diffuse into HfO2 and cause the HfO2/Si0.7Ge0.3 interface to deteriorate. Moreover, a post-HfO2-deposition (post-O) ozone indirect oxidation is proposed for the HfO2/Si0.7Ge0.3 stack; it is found that compared with pre-O sample, the Dit of the post-O sample decreases by about 50% due to less GeOx available in the IL layer. This is because the amount of oxygen atoms reaching the interface of HfO2/Si0.7Ge0.3 decreases and the thickness of IL in the post-O sample also decreases. To further reduce the Dit of the HfO2/Si0.7Ge0.3 interface, a Si-cap passivation with the optimal thickness of 1 nm is developed and an excellent HfO2/Si0.7Ge0.3 interface with Dit of 1.53 × 1011 eV−1cm−2 @ E−Ev = 0.36 eV is attained. After detailed analysis of the chemical structure of the HfO2/IL/Si-cap/Si0.7Ge0.3 using X-ray photoelectron spectroscopy (XPS), it is confirmed that the excellent HfO2/Si0.7Ge0.3 interface is realized by preventing the formation of Hf-silicate/Hf-germanate and Si oxide originating from the reaction between HfO2 and Si0.7Ge0.3 substrate.

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Nitride passivation of the interface between high-k dielectrics and SiGe

Cited by 38 publications

References 24 publications

Are Electrospun Fibrous Membranes Relevant Electrode Materials for Li‐Ion Batteries? The Case of the C/Ge/GeO₂ Composite Fibers

Are Electrospun Fibrous Membranes Relevant Electrode Materials for Li‐Ion Batteries? The Case of the C/Ge/GeO₂ Composite Fibers

Advanced process and electron device technology

Investigate on the Mechanism of HfO2/Si0.7Ge0.3 Interface Passivation Based on Low-Temperature Ozone Oxidation and Si-Cap Methods

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Nitride passivation of the interface between high-k dielectrics and SiGe

Cited by 38 publications

References 24 publications

Are Electrospun Fibrous Membranes Relevant Electrode Materials for Li‐Ion Batteries? The Case of the C/Ge/GeO2 Composite Fibers

Are Electrospun Fibrous Membranes Relevant Electrode Materials for Li‐Ion Batteries? The Case of the C/Ge/GeO2 Composite Fibers

Advanced process and electron device technology

Investigate on the Mechanism of HfO2/Si0.7Ge0.3 Interface Passivation Based on Low-Temperature Ozone Oxidation and Si-Cap Methods

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Are Electrospun Fibrous Membranes Relevant Electrode Materials for Li‐Ion Batteries? The Case of the C/Ge/GeO₂ Composite Fibers

Are Electrospun Fibrous Membranes Relevant Electrode Materials for Li‐Ion Batteries? The Case of the C/Ge/GeO₂ Composite Fibers