1981
DOI: 10.1016/0029-554x(81)90726-6
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Nitrogen distribution and nitride precipitation in 14N+ ion implanted 304 and 316 steels

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Cited by 37 publications
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“…Through the annals of literature related to nitriding studies which involve ion implantation, deviation from predicted Gaussian profiles in the form of movement of the profiles towards the surface was clearly observed. Though a majority did not provide any discussion on this aspect, a few have invoked computer codes to account for sputtering and have obtained good fit to the experimental depth profiles [3][4][5][6][7][8][9]. But in the present case, owing to low fluence implantation, the role of sputtering (sputtering yield %1.3 atom/ion) in causing a deviation to the nitrogen profile should be ignored.…”
Section: Introductionmentioning
confidence: 94%
“…Through the annals of literature related to nitriding studies which involve ion implantation, deviation from predicted Gaussian profiles in the form of movement of the profiles towards the surface was clearly observed. Though a majority did not provide any discussion on this aspect, a few have invoked computer codes to account for sputtering and have obtained good fit to the experimental depth profiles [3][4][5][6][7][8][9]. But in the present case, owing to low fluence implantation, the role of sputtering (sputtering yield %1.3 atom/ion) in causing a deviation to the nitrogen profile should be ignored.…”
Section: Introductionmentioning
confidence: 94%