2001
DOI: 10.1063/1.1339854
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Nitrogen doping of tetrahedral amorphous carbon films: Scanning tunneling spectroscopy

Abstract: Amorphous nitrogenated carbon films with nitrogen atomic concentration between 12% and 29% were deposited using a filtered cathodic vacuum arc and a Kaufman-type ion source. The surface topography of the samples has been investigated by scanning tunneling microscopy in ultrahigh vacuum, showing that the roughness of the film surface decreases with nitrogen concentration. Scanning tunneling spectroscopy is employed to understand the role of nitrogen in the change of the surface microstructure and electronic str… Show more

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Cited by 24 publications
(19 citation statements)
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“…The reduction in E. with sulfur concentration is plotted in Figure 4, which provides an inverse correlation between E, and sulfur concentration within the range of our study. Similar observations have also been found for nitrogen-doped amorphous carbon materials [20][21][22][23][24] and metal-oxide-semiconductor (MOS) structures by several authors [27][28][29].…”
Section: Resultssupporting
confidence: 67%
See 1 more Smart Citation
“…The reduction in E. with sulfur concentration is plotted in Figure 4, which provides an inverse correlation between E, and sulfur concentration within the range of our study. Similar observations have also been found for nitrogen-doped amorphous carbon materials [20][21][22][23][24] and metal-oxide-semiconductor (MOS) structures by several authors [27][28][29].…”
Section: Resultssupporting
confidence: 67%
“…While morphology on sulfur addition: (A and C) 2.0% the film grown with 100 ppm is quite CH 4 , no sulfur is incorporated in chamber, (B and D) similar to intrinsic material (n-C), one 2.0 % CH 4 , 500 ppm H 2 S. All of these samples are grown at substrate temperature of 900 TC. [22][23][24]. Figure 3.…”
Section: Resultsmentioning
confidence: 99%
“…5(b)), so it is evident that in inert atmosphere the D component appear at 1.18 eV above the Fermi energy level and disappear when oxygen is adsorbed onto film surface. In addition we have estimated the energy gap determining the edges of the bands from the parabolic fitting of the normalized conductance intersecting the line with 0 tunnelling current [26]. The results are summarized in Table 2.…”
Section: Scanning Tunnelling Microscopymentioning
confidence: 99%
“…Unlike diamond, some forms of DLC can be doped n-type by the addition of nitrogen or phosphorous, and this increases their electron emission at low turn-on fields by raising their Fermi level and lowering the work function of the material. Recently, a great deal of interest arose from the experimental and theoretical findings that sulfur is a donor dopant in microcrystalline diamond [8], and it has the potential to enhance the electron field emission properties of carbon films by providing electrons close to the conduction band [9]. There are several reports on N doping to DLC films deposited by a variety of techniques, such as plasma enhanced chemical vapour deposition [10], filtered cathodic vacuum arc [11] etc., to enhance the emission current density at lower turnon fields than undoped DLC.…”
Section: Introductionmentioning
confidence: 99%