This study analyses the glow discharge of He and N 2 mixture at the pressure of 2.0 Torr, power of 10 W, and flow rate of 16.5 l/min, by using optical emission spectroscopy and mass spectrometry. The emission bands were measured in the wavelength range of 200-1100 nm. The principal species observed were N 2, and He, which are in good agreement with the results of mass spectrometry. Besides, the electron temperature and ion density were determined by using a double Langmuir probe. Results indicate that the electron temperature is in the range of 1.55-2.93 eV, and the electron concentration is of the order of 10 10 cm À3 . The experimental results of electron temperature and ion density for pure N 2 and pure He are in good agreement with the values reported in the literature. V C 2014 AIP Publishing LLC.