2013
DOI: 10.1021/jz400400u
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No Graphene Etching in Purified Hydrogen

Abstract: A systematic study has been conducted to investigate the role of hydrogen in the etching reaction of graphene films grown on copper foils. The results at 825 °C and 500 mTorr showed no evidence of graphene etching by purified ultrahigh purity (UHP)-grade hydrogen, whereas graphene films exposed to unpurified UHP-grade hydrogen were considerably etched due to the presence of oxygen or other oxidizing impurities. This finding reveals not only the major impact of oxidizing impurities in the graphene etching react… Show more

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Cited by 80 publications
(103 citation statements)
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“…In the shrinkage process, the C atoms were considered to detach from the graphene lattice and to desorb from the substrate, which is affected by the reaction with residual oxygen in the system 46 . (Note: it was reported that an atomic hydrogen to etch graphene is not formed on Cu 47 .) The Arrhenius plots provided almost the similar E a values for growth and shrinkage.…”
Section: Resultsmentioning
confidence: 99%
“…In the shrinkage process, the C atoms were considered to detach from the graphene lattice and to desorb from the substrate, which is affected by the reaction with residual oxygen in the system 46 . (Note: it was reported that an atomic hydrogen to etch graphene is not formed on Cu 47 .) The Arrhenius plots provided almost the similar E a values for growth and shrinkage.…”
Section: Resultsmentioning
confidence: 99%
“…1030 °C using CH 4 , H 2 and Ar process gases with the AB pellet holder positioned in a cold zone. The AB source was then moved to a position closer to the furnace for a pre-heating period, during which time the flow of dilute CH 4 feedstock was maintained in order to avoid etching of the hexagonal graphene template by hydrogen (or possibly by impurities present even in ultrahigh purity hydrogen 29 ) while the AB temperature rose to a steady state value of 60–70 °C to induce sublimation. 30 It was found that 2 min of pre-heating led to G-BN structures with a comparatively sharp and straight interface.…”
Section: Resultsmentioning
confidence: 99%
“…In either case, during CVD the presence of an oxidizing agent can positively affect the growing carbonaceous film by removing amorphous carbon phases and preferentially etching defects, as for carbon nanotubes [13]. By contrast, the presence of molecular oxygen, even in trace quantities, is detrimental as it leads to the etching of graphene [31]. In our perspective, the role of the oxygen should be further investigated since it might also play a role in speeding up the growth rate of graphene.…”
Section: Discussionmentioning
confidence: 99%