2005
DOI: 10.1016/j.infrared.2004.11.003
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Noise behavior of amorphous GexSi1−xOy for microbolometer applications

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Cited by 35 publications
(6 citation statements)
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“…Un-cooled micro-bolometers are already used for the infrared (IR) spectral region ( [5][6][7][8] and references therein) and for the detection and imaging at the terahertz frequency range [9][10][11][12][13]. Different materials, such as metals, amorphous, polycrystalline and crystalline semiconductors, vanadium oxide, and high temperature super-conductors are used as the thermo-sensing layer.…”
Section: Introductionmentioning
confidence: 99%
“…Un-cooled micro-bolometers are already used for the infrared (IR) spectral region ( [5][6][7][8] and references therein) and for the detection and imaging at the terahertz frequency range [9][10][11][12][13]. Different materials, such as metals, amorphous, polycrystalline and crystalline semiconductors, vanadium oxide, and high temperature super-conductors are used as the thermo-sensing layer.…”
Section: Introductionmentioning
confidence: 99%
“…Although there are many materials commonly used in microbolometer fabrication -Titanium (Ti) [9], Vanadium Oxide (VO) [10], Yttrium barium copper oxide (YBaCuO, YBCO) [11], GeSiO [12], poly SiGe [13], BiLaSrMnO and others -the most attractive among them are semiconductor (amorphous silicon Į-Si, poly-Si, Si-Ge) [4], because they have a higher temperature coefficient of resistance (TCR) than other materials.…”
Section: A Materials Propertiesmentioning
confidence: 99%
“…Amorphous GCxSii-xOy, a compound of conventional semiconductors, is an attractive sensing material for microbolometer with high temperature coefficient of resistance and simple deposition technique, although the presence of high 1/f-noise was found to be an issue that hmits the microbolometer performance [4,5].…”
Section: Introductionmentioning
confidence: 99%