Noise model considering electrical feed-through under force rebalance closed-loop detection of MEMS gyroscope

Bu, Feng; Wang, Xi; Fan, Bo; Guo, Shuwen; Xu, Dacheng; Xu, Xiang; Zhao, Heming

doi:10.1088/1361-6439/ab7c34

Cited by 9 publications

(7 citation statements)

References 29 publications

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“…Therefore, the above noise can be regarded as white noise in the BW frequency range of the gyroscope; that is, the PSD of noise at different frequencies is the same. Therefore, according to formula (17), S Nout (ω) (PSD of output noise, unit: V 2 Hz −1 ) can be expressed as:…”

Section: Ner Spectrummentioning

confidence: 99%

“…Currently, to the best of our knowledge no research has been conducted on the correlation between BW and noise under the modulation-demodulation FTR closed-loop control. In our previous research [16,17], we analyzed the output noise characteristics under FTR closed-loop, and found that the output noise is directly related to the signal pickoff circuit noise, and the noise is multiplied by the amplifier circuit. However, if the amplifier gain is reduced to suppress noise, the BW will also be reduced.…”

Section: Introductionmentioning

confidence: 99%

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Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control

Bu¹,

Fan²,

Xu³

et al. 2021

J. Micromech. Microeng.

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The force-to-rebalance (FTR) closed-loop detection method is commonly used to expand the bandwidth (BW) for micro-electro-mechanical system (MEMS) gyroscopes with low-frequency split and high-quality factors. However, the relationship between the BW and output noise is often incompatible; thus, reducing the detection accuracy of the gyroscope. This paper presents an analysis of the BW and noise spectra under modulation-demodulation FTR gyroscopes. The expressions for the BW and the noise-equivalent rate (NER) spectrum are derived to explore the effects of the loop gain on the BW and NER. It is demonstrated that the gain of the amplifier circuit is maximally transferred to the vibration displacement signal conversion part, which can reduce the output noise without affecting the BW. The simulation and experimental results on the Cobweb-like disk resonator gyroscope show that the derived expressions of BW and NER are correct, and the noise optimization method is effective, which provides an idea for the realization of a high-precision MEMS gyroscope.

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Section: Ner Spectrummentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control

Bu¹,

Fan²,

Xu³

et al. 2021

J. Micromech. Microeng.

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“…A sixteen-sided cobweb-like disk resonator MEMS gyroscope was designed and fabricated [ 26 , 27 , 28 ]. The gyroscope consisted of 10 concentric sixteen-sided cobweb-like rings connected through eight alternating spokes to a single central anchor, as shown in Figure 2 .…”

Section: Mems Gyroscope Design and Fabricationmentioning

confidence: 99%

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

Feng

Wang

Qiao³

et al. 2021

Micromachines

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In high-reliability applications, the health condition of the MEMS gyroscope needs to be known in real time to ensure that the system does not fail due to the wrong output signal. Because the MEMS gyroscope self-test based on the principle of electrostatic force cannot be performed during the working state. We propose that by monitoring the quadrature error signal of the MEMS gyroscope in real time, an online self-test of the MEMS gyroscope can be realized. The correlation between the gyroscope’s quadrature error amplitude signal and the gyroscope scale factor and bias was theoretically analyzed. Based on the sixteen-sided cobweb-like MEMS gyroscope, the real-time built-in self-test (BIST) method of the MEMS gyroscope based on the quadrature error signal was verified. By artificially setting the control signal of the gyroscope to zero, we imitated several scenarios where the gyroscope malfunctioned. Moreover, a mechanical impact table was used to impact the gyroscope. After a 6000 g shock, the gyroscope scale factor, bias, and quadrature error amplitude changed by −1.02%, −5.76%, and −3.74%, respectively, compared to before the impact. The gyroscope failed after a 10,000 g impact, and the quadrature error amplitude changed −99.82% compared to before the impact. The experimental results show that, when the amplitude of the quadrature error signal seriously deviates from the original value, it can be determined that the gyroscope output signal is invalid.

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“…In theory, as long as the noise of the control system is sufficiently low, the threshold of the gyro after an infinite number of iterations will eventually be close to 0°/s. In practice, as the circuit noise [22] will submerge the signal of the precession angular-rate bias, the circuit noise must be reduced to further improve the RIG performance.…”

Section: Precession Angular-rate Bias Compensationmentioning

confidence: 99%

A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

et al. 2020

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The structural asymmetry of the MEMS rate-integrating gyro (RIG) mode produces a threshold and an angle-dependent bias (ADB) that cause gyroscopes operating in this mode to stop working at input rates below the threshold and degrade the linearity of the output angle. This defect in the RIG output angle is actually caused by a precession angular-rate bias that results from both damping asymmetry (anisodamping) and stiffness asymmetry (anisostiffness). This paper describes a novel compensation method based on Fourier series fitting combined with a multiple iteration technique. The proposed compensation method can significantly reduce both the input rate threshold and ADB. Simulations indicate that the threshold and ADB caused by anisodamping and anisostiffness can be reduced by three orders of magnitude. An experimental application of this method produced a MEMS RIG threshold as low as 0.05° per second, representing an improvement of two orders of magnitude and lower than has previously been reported. INDEX TERMS MEMS rate-integrating gyro, Asymmetric damping, Asymmetric stiffness, Threshold.

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Noise model considering electrical feed-through under force rebalance closed-loop detection of MEMS gyroscope

Cited by 9 publications

References 29 publications

Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control

Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control

Real-Time Built-In Self-Test of MEMS Gyroscope Based on Quadrature Error Signal

A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

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