Non-contact online thickness measurement system for metal films based on eddy current sensing with distance tracking technique

Li, Wei; Wang, Hongbo; Feng, Zhihong

doi:10.1063/1.4947234

Cited by 27 publications

(7 citation statements)

References 23 publications

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“…The error in permeability prediction was less than 2% within the evaluated range [132]. In addition, H. Wang et al proposed that the slope of the lift-off curve (LOC) in the RL impedance plane could characterize the target thickness which was independent of lift-off variation [136,137].…”

Section: Lift-off Compensating Algorithmsmentioning

confidence: 94%

Eddy Current Measurement for Planar Structures

Xia

Huang

Chen

et al. 2022

Sensors

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Eddy current (EC) testing has become one of the most common techniques for measuring metallic planar structures in various industrial scenarios such as infrastructures, automotive, manufacturing, and chemical engineering. There has been significant progress in measuring the geometry, electromagnetic properties, and defects of metallic planar structures based on electromagnetic principles. In this review, we summarize recent developments in EC computational models, systems, algorithms, and measurement approaches for planar structures. First, the computational models including analytical models, numerical methods, and plate property estimation algorithms are introduced. Subsequently, the impedance measurement system and probes are presented. In plate measurements, sensor signals are sensitive to probe lift-off, and various algorithms for reducing the lift-off effect are reviewed. These approaches can be used for measureing thickness and electromagnetic properties. Furthermore, defect detection for metallic plates is also discussed.

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Section: Lift-off Compensating Algorithmsmentioning

confidence: 94%

Eddy Current Measurement for Planar Structures

Xia

Huang

Chen

et al. 2022

Sensors

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“…Based on the electric eddy current effect [23], the sensor could accurately detect the distance between the measured body, namely the target in the schematic, which must be a metallic conductor, and the coil in a probe through the change in electrical signal in the circuits. This method has the advantages of high sensitivity, strong anti-interference ability, non-contact measurement, fast response speed, and being free from oil and water and other factors [18,24,25]. One sensor could measure the displacement to a metal surface on one side.…”

Section: Sensor Type and Measurement Principlementioning

confidence: 99%

Research and Development of a Multi-Point High-Precision Displacement Measuring System for the Installation Space of Vibration Isolation on Submarine Raft Structures

Yu,

Xu,

Wang

et al. 2023

Applied Sciences

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The well installed status of raft vibration isolation is undoubtedly of great significance in marine engineering, especially for submarines. To achieve this, the accurate measurement of the installation space of the vibration isolation is necessary. The traditional measuring technique has many drawbacks. Therefore, simultaneously measuring the multi-point spacing with high precision between two metal surfaces is the focus of this work. Based on eddy current sensing principle, a multi-point spacing measuring system with a simple structure and good measurement accuracy has been developed and reported. The system includes a sensor array component, an integrated controlling component, and a calibration platform. The measured data from multiple points are obtained at the same time through the sensor array and are uploaded to the host computer and a corresponding LabVIEW program was exploited to display, process, and store the spacing results. Furthermore, the least square algorithm has been employed to calculate the flatness of the measured metal surfaces, and the GUM (guide to the expression of uncertainty in measurement) method has been applied to evaluate the flatness error uncertainty. The experimental tests show that each measuring duration only lasts for seconds to get results and the error uncertainty of the measured surface flatness could reduce to less than 1.0 μm. The developed measuring system has better efficiency and higher precision compared to traditionally manual operations. The measuring and analysis method could also be applied to other related situations.

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“…This method is well suited for transparent film, but cannot be applied to metal. The eddy current method [27][28][29] is a non-destructive and non-contact method with high sensitivity [30][31] that satisfies the requirements for measuring the electrical conductivity of a copper film.…”

Section: Introductionmentioning

confidence: 99%

Automated Control Ofthe Thin Films Electricalconductivity by the Eddy Current Method

Malikov

2024

Eurasian phys. tech. j.

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The article considers the possibility of using the eddy current method of non-destructive testing for the problems of measuring the electrical conductivity of thin metal films. As the object of measurement, we used copper films of various thicknesses obtained by vacuum vapor deposition. A review of current trends in the use of copper films in modern industry and science is presented, and an analysis is made of current methods of non-destructive testing suitable for studying thin copper films. A brief description of the deposition method and the hardware-software complex for measuring the electrical conductivity of the film is presented. A calibration curve is presented, which makes it possible to restore the values of the electrical conductivity of the film from the value of the signal of the eddy current transducer. GaAs samples were selected to construct a calibration curve. The decision is explained by the proximity of the values of the electrical conductivity of this chemical compound to the calculated indicators of the obtained thin films. The results of testing films with different characteristics are presented and the distribution of the electrical conductivity of the films depending on the batch is shown. A series of practical measurements of thin films demonstrated the existence of a relationship between the mass of the initial substance that was subjected to deposition and the characteristics of the resulting films. According to different values of electrical conductivity within the same batch, it was concluded that there is a difference in the quality of deposition of different films.

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Non-contact online thickness measurement system for metal films based on eddy current sensing with distance tracking technique

Cited by 27 publications

References 23 publications

Eddy Current Measurement for Planar Structures

Eddy Current Measurement for Planar Structures

Research and Development of a Multi-Point High-Precision Displacement Measuring System for the Installation Space of Vibration Isolation on Submarine Raft Structures

Automated Control Ofthe Thin Films Electricalconductivity by the Eddy Current Method

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