Non-destructive characterization and evaluation of thin films by laser-induced ultrasonic surface waves

Schneider, Dieter; Tucker, Mark

doi:10.1016/s0040-6090(96)09029-3

Cited by 102 publications

(48 citation statements)

References 7 publications

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“…These deviations are assumed to occur due to imperfections in the measurement method and due to inaccuracies during processing and sample preparation. Despite the large standard deviations for Young's moduli, the measurement results compare well with literature data when excluding the results in (Schneider and Tucker 1996) that are far off other literature values.…”

Section: Fabrication Of Test Samplessupporting

confidence: 76%

“…Using a simplified model that assumes plane-strain deformation in the membrane middle section, a plane-strain modulus E ps can be measured. Other methods that allow for the extraction of Young's modulus and residual stress include measurement of cantilever deflection using an atomic force microscope (AFM) probe (Serre et al 1999), the surface wave method (Schneider and Tucker 1996) and microscale tensile testing (Jackson et al 2005).…”

Section: Introductionmentioning

confidence: 99%

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Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications

et al. 2012

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Silicon carbide (SiC) is a promising material for applications in harsh environments. Standard silicon (Si) microelectromechanical systems (MEMS) are limited in operating temperature to temperatures below 130°C for electronic devices and below 600°C for mechanical devices. Due to its large bandgap SiC enables MEMS with significantly higher operating temperatures. Furthermore, SiC exhibits high chemical stability and thermal conductivity. Young's modulus and residual stress are important mechanical properties for the design of sophisticated SiCbased MEMS devices. In particular, residual stresses are strongly dependent on the deposition conditions. Literature values for Young's modulus range from 100 to 400 GPa, and residual stresses range from 98 to 486 MPa. In this paper we present our work on investigating Young's modulus and residual stress of SiC films deposited on single crystal bulk silicon using bulge testing. This method is based on measurement of pressure-dependent membrane deflection. Polycrystalline as well as single crystal cubic silicon carbide samples are studied. For the samples tested, average Young's modulus and residual stress measured are 417 GPa and 89 MPa for polycrystalline samples. For single crystal samples, the according values are 388 GPa and 217 MPa. These results compare well with literature values.

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Section: Fabrication Of Test Samplessupporting

confidence: 76%

Section: Introductionmentioning

confidence: 99%

Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications

et al. 2012

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“…magnetrons presented densities between 4.0 and 4.6 3 Ž grcm , while those prepared in static mode one mag-. netron revealed densities mainly in the range 3.0᎐3.9 grcm 3 . These values are much lower than that of bulk Ž 3 .…”

Section: Chemical Analysis and Densitymentioning

confidence: 96%

“…Young's modulus of the substrates high speed steel was measured by both techniques. SAW analyses, using a density of 8.56 grcm 3 and a Poisson ratio of 0.27, resulted in a Young's modulus of 220 GPa, while the indentation technique gave a value of 268 GPa. The reason for this difference is not yet known.…”

Section: Elastic Modulusmentioning

confidence: 99%

Elastic properties of (Ti,Al,Si)N nanocomposite films

Carvalho

Vaz

Rebouta

et al. 2001

Surface and Coatings Technology

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Ž. Ti,Al,Si N films have been prepared by d.c. and rf reactive magnetron sputtering, with Si contents in the range 2᎐11 at.% and Ž . Al contents between 4 and 19 at.%. Samples prepared in rotation mode three magnetrons presented densities between 4.0 and 3 Ž . 4.6 grcm , while samples prepared in static mode magnetron with Ti target with small pieces of Si and Al displayed densities mainly in the range 3.0᎐3.9 grcm 3 . For comparison purposes, the evaluation of Young's modulus was performed by both Ž . depth-sensing indentation and surface acoustic wave SAW techniques. Indentation results revealed systematically higher values than those obtained by SAW. These discrepancies might be related with the relatively low density of the films. Hardness values of approximately 60 GPa were obtained with samples with a composition of approximately 28.5 at.% titanium, 12 at.% aluminium, 9.5 at.% silicon and 50 at.% nitrogen. XRD patterns showed the presence of two different crystalline phases, as in the case of Ž . Ž . Ti,Si N films. One is assigned to TiN phase lattice parameter of approx. 0.429 nm and the second, the so-called solid solution Ž . which is developed in situations of low surface mobility, revealed a lattice parameter 0.419 nm slightly lower than that of bulk TiN. ᮊ

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“…[11][12][13] The coating thickness was set to 3, 5, 7 and 10 lm. The analysis was carried out for crack depth ranging from 0.4 to 0.9 of the coating thickness.…”

Section: Tensile Deformation Behaviour Of the Titanium Alloy With Harmentioning

confidence: 99%

Tensile Deformation Behaviour of the Titanium Alloy with Hard Elastic Coating

Ziaja

Sieniawski

2006

Adv Eng Mater

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ExperimentalResidual stress distributions and their relaxation via plastic deformation and the formation of dislocations was characterized with Polychromatic X-ray microdiffraction (PXM). PXM was performed with the 3D X-ray crystal microscope using a modified Laue diffraction method based on polychromatic radiation. [4,8] This approach allows for true 3D mapping of crystalline phase, orientation, elastic strain and plastic deformation with unprecedented spatial resolution. The differential-aperture microbeam technique [8] allows mapping of the crystal structure orientation and distortions with sub-micron spatial resolution in three dimensions. This method allows a micrometre-scale resolution with depth (along the path of the incident beam). At each depth the data are obtained by computer reconstruction for each pixel of the CCD. Details on the experimental setting and data collection can be found elsewhere. [4,8] Data collection has been carried out using microbeam Laue diffraction on beamline 34ID at the APS.Scanning electron microscopy (SEM) and orientation imaging microscopy (OIM) was performed using Philips XL30.Autogenous welds of thin superalloy sheets with the size of 50 × 70 × 0.8 mm were prepared at 1.5 kw with continuous wave Nd-YAG laser in two different crystallographic direction, parallel and perpendicular to the dendrite orientation in the plane of the sheet. Different processing conditions were used: power was varied in the interval of 300-850 w; welding velocity in the interval of -2.1-21.2 mm/sec. The increasing demands for higher performance and more severe application conditions have been the main driving forces for wider use of titanium alloys for engineering components. The main reason for that is a favourable combination of properties like high specific strength, corrosion resistance and biocompatibility. However low resistance to oxidation at high temperature and poor tribological behaviour are the main reasons that very often surface treatment is applied for elements made of titanium alloys in order to obtain surface layer having favourable properties. PVD methods lead to formation of intermetallic or compound layers (e.g. TiN, TiC, Ti 3 Al, TiAl, Al 2 O 3 ) with thickness of the order of several lm. As the result of thermochemical treatment (e.g. nitriding, carbonitriding) hardened diffusion layer is formed, at the top of which intermetallic or compound layer can also be present (e.g. TiN). These phases have high Young's modulus and can be treated as perfectly elastic. Because of high value of elastic modulus and very low plastic deformability of the layer, when large tensile stresses are present, microcracks appear in the layer. They induce stress concentration that leads to local plastic deformation of the substrate at the macroscopic tensile stress value below its yield strength. [1,2] Plastic deformation of the substrate is additional factor decreasing durability of the layer because of delamination and flaking. [2,3] This phenomenon was most frequently studied for indentation and fri...

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Non-destructive characterization and evaluation of thin films by laser-induced ultrasonic surface waves

Cited by 102 publications

References 7 publications

Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications

Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications

Elastic properties of (Ti,Al,Si)N nanocomposite films

Tensile Deformation Behaviour of the Titanium Alloy with Hard Elastic Coating

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