Non-destructive determination of thickness of the dielectric layers using EDX

Sokolov, Sergey; Kelm, E. A.; Милованов, Р. А.; Абдуллаев, Д. А.; Sidorov, Lev N.

doi:10.1117/12.2265570

Cited by 3 publications

(6 citation statements)

References 9 publications

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“…For this reason, there is no direct information on the thickness, but the intensity of the peaks in the spectra are a function of thickness as well as it is for XRF. EPMA is not much known for thickness measurement, but it is an attractive candidate because it enables fast, quantitative [148,149] and non-destructive [150] analysis with the additional benefit of having a lateral resolution in the micron range [151]. In addition to that, the probe (electrons) is not very penetrating (Figure 14), and for this reason, it is possible (by adjusting the beam energy) to analyze ultrathin films or just the top layer to obtain their composition [152][153][154][155][156].…”

Section: Electron Probe Microanalysismentioning

confidence: 99%

“…In the last fifty years, many software programs were written to simulate EDS spectra [168]; many of them were written by researchers, and some were commercial: MAGIC [169,170], STRATAGEM [171][172][173], GMRFILM [148], Electron Flight Simulator [174,175], ThinFilmID [176], LayerProbe [176,177], pyPENELOPE [178,179], Win X-ray [180,181], MC X-ray [180,182], XFilms [183], CASINO [150,[184][185][186][187], CalcZAF [188,189] and DTSA-II [190][191][192]. Many of these softwares exploit the PENEPMA algorithm [179].…”

Section: Electron Probe Microanalysismentioning

confidence: 99%

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Measuring the Thickness of Metal Coatings: A Review of the Methods

et al. 2020

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Thickness dramatically affects the functionality of coatings. Accordingly, the techniques in use to determine the thickness are of utmost importance for coatings research and technology. In this review, we analyse some of the most appropriate methods for determining the thickness of metallic coatings. In doing so, we classify the techniques into two categories: (i) destructive and (ii) non-destructive. We report on the peculiarity and accuracy of each of these methods with a focus on the pros and cons. The manuscript also covers practical issues, such as the complexity of the procedure and the time required to obtain results. While the analysis focuses most on metal coatings, many methods are also applicable to films of other materials.

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Section: Electron Probe Microanalysismentioning

confidence: 99%

Section: Electron Probe Microanalysismentioning

confidence: 99%

Measuring the Thickness of Metal Coatings: A Review of the Methods

et al. 2020

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show abstract

“…For this reason, there is no direct information on the thicknesses, but the intensities of the peaks in the spectra are a function of the thickness, as is the case for XRF. EPMA is not known much for thickness measurements, but it is an attractive candidate because it enables fast, quantitative [122,123], and non-destructive [124] analysis with the additional benefit of having a lateral resolution in the micron range [125]. In addition to that, the probe (electrons) is not very penetrating ( Figure 10), and for this reason it is possible (by adjusting the beam energy) to analyse ultrathin films or just the top layer of a film to obtain its composition [126][127][128][129][130].…”

Section: Electron Probe Microanalysismentioning

confidence: 99%

“…Both the absolute thickness [136,137] as well as the mass thickness [138][139][140][141] were taken into consideration for the quantification. In the last fifty years, many pieces of software were written to simulate EDS spectra [142]; many of them are written by researchers and some were commercial: MAGIC [143,144], STRATAGEM [145][146][147], GMRFILM [122], Electron Flight Simulator [148,149], ThinFilmID [150] and LayerProbe [150,151], pyPENELOPE [152,153], Win X-Ray [154,155] and MC X-Ray [154,156], XFilms [157], CASINO [124,[158][159][160][161], CalcZAF [162,163] and DTSA-II [164][165][166]. Many of these pieces of software exploit the PENEPMA algorithm [153].…”

Section: Electron Probe Microanalysismentioning

confidence: 99%

“…In 2016, Sokolov [124] measured the thickness of Silicon dioxide and silicon nitride thin films using EDS, varying the penetration depth of the analysis, changing the acceleration voltage of the beam, and correlating the thickness of the film with the signal of the substrate elements to the collected noise. Stanford [173] in 2020 measured the oxide layer formation on Pu from 35 nm to 400 nm using measured standards to build the k-ratio calibration curves of oxygen through FIM-SEM analysis.…”

Section: Electron Probe Microanalysismentioning

confidence: 99%

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Measuring the Thickness of Metal Films: A Selection Guide to the Most Suitable Technique

Giurlani

Berretti

Lavacchi

et al. 2020

2nd Coatings and Interfaces Web Conference (CIWC-2 2020)

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The determination of thickness has a fundamental importance in all fields in which the implementation of films and coatings are required and takes a crucial role in the electroplating sector. The thickness influences many aspects of the coatings such as electrical, mechanical, corrosion protection, and even aesthetic properties. In the multitude of applications of thin layer coatings, the variability of thicknesses and materials is very high, as well as the variability of possible techniques that can be used to determine the characteristics of the layers of interest. The first distinction that can be made between these techniques is that which divides destructive techniques from non-destructive ones, in which, however, the semi- or micro-destructive techniques are immediately difficult to place. Other important parameters to consider are the cost, both for the purchase of the instrumentation and for each single analysis, the difficulties in preparing and measuring the sample, data processing, and obviously the detectable thickness ranges, the possible measurable materials, and precision and accuracy. The purpose of this work is to compare the characteristics of the various investigation methods, with a particular focus on metal film applications, so that it will be easier to choose the most suitable technique for each purpose.

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X-ray Microanalysis of Precious Metal Thin Films: Thickness and Composition Determination

2018

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Abstract:Measuring the thickness and the composition of precious metal thin films is a challenging task. Currently, the available techniques for thickness measurements are either destructive or need heavy assumptions on the nature of the sample, relying on information that are not always available with sufficient accuracy. In this paper we propose a new methodology based on X-ray microanalysis that can complement, with better lateral resolution, the use of X-ray Fluorescence, the most widely employed technique for measuring the thickness of electrodeposited coatings. The proposed method employs a combination of energy dispersive microanalysis spectra acquisition and Monte Carlo simulation. The effectiveness of the technique has been demonstrated by the measure of the thickness and the composition of a thin 24 kt gold electroplated film that contained small amount of nickel. Results have been validated by comparing data with those obtained by X-ray fluorescence and the scanning electron microscopy of metallographic cross-sections.

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Non-destructive determination of thickness of the dielectric layers using EDX

Cited by 3 publications

References 9 publications

Measuring the Thickness of Metal Coatings: A Review of the Methods

Measuring the Thickness of Metal Coatings: A Review of the Methods

Measuring the Thickness of Metal Films: A Selection Guide to the Most Suitable Technique

X-ray Microanalysis of Precious Metal Thin Films: Thickness and Composition Determination

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