Abstract. By method of in situ differential spectroscopy it was established that at the formation of monolayer Fe, Cr, Ca, Mg silicide and Mg stannide islands on the atomically clean silicon surface an appearance of loss peaks characteristic for these materials in the energy range of 1.1-2.6 eV is observed. An optimization of growth processes permit to grow monolithic double nanoheterostructures (DNHS) with embedded Fe, Cr and Ca nanocrystals, and also polycrystalline DNHS with NC of Mg silicide and Mg stannide and Ca disilicide. By methods of optical spectroscopy and Raman spectroscopy it was shown that embedded NC form intensive peaks in the reflectance spectra at energies up to 2.5 eV and Raman peaks. In DNS with E-FeSi2 NC a photoluminescence and electroluminescence at room temperature were firstly observed.Semiconductor monolithic and polycrystalline nanoheterostructures created on the base of embedded in silicon matrix the nanocrystals (NCs) of semiconducting silicides (E-FeSi2, CrSi2, h-CaSi2, Mg2Si), as well as Mg stannide-silicide NCs can have fundamentally new optical properties associated with confinement of electrons and excitons. It is important to develop and create new light emitting and detecting devices and thermoelectrical convertors within silicon complimentary metal -oxide -semiconductor (CMOS) technology. Twoand three-layer structures with embedded E-FeSi2 precipitates (100-150 nm) in silicon with p-n junction were previously grown [1][2][3], as well as discovered and studied their electroluminescent properties. Decrease of E-FeSi2 NCs sizes down to 40-60 nm and an increase in the number of layers embedded into silicon, have shown promise of this approach in terms of increasing the efficiency of photo-and electroluminescence in grown structures [4,5]. To reduce the probability of mismatch dislocation formation one can use embedding in silicon the nanosize (5-20 nm) crystals of silicides CrSi2, Mg2Si, hCaSi2) and Mg stannide, when elastic adjustment of nanocrystal lattice to the silicon lattice or three-dimensional pseudomorphism is proposed. In this case, on the interface semiconductor silicide (stannide) nanocrystals -silicon can expect an absence or significant decrease of dangling bonds and, accordingly, carrier scattering centers and their nonradiative recombination as well as transport of carriers without additional scattering mechanisms.