Defects created by self-organized InAs quantum dot growth in a GaAs matrix were investigated. Growth of the quantum dots was found to enhance strongly the tendency towards inhomogeneous growth. The inhomogeneity seems to stem from point defect clusters generated in the vicinity of a molecular beam epitaxy (MBE)/atomic layer MBE (ALMBE) interface. The point defects identified are characteristic of MBE and ALMBE GaAs layers. The InAs quantum dot states and interface states are not clearly detected since they are located in a depleted layer surrounding the point defects clusters.Introduction InAs quantum dots (QDs) in a GaAs matrix are one of the main model systems for growing nanoscale devices by the self-organizing growth techniques. Different epitaxial structures containing InAs QDs in GaAs were investigated in several works [1][2][3][4]. The measurements often show nonexponential decays [5] and metastable properties [6], which is explained by the different epitaxial structures and by quantum mechanical effects. Our earlier investigations have shown that the growth of InAs QDs generates point defects, which largely influence the current-voltage (I-V) and the capacitancevoltage (C-V) characteristics. The InAs QD quantum states were not clearly identified by deep level transient spectroscopy (DLTS) [7,8]. Fast defect transient (FDT) measurements in the QD samples revealed a series RC component of the capacitance transients [7,8]. The QDs were found to cause current instabilities at low temperature, due to metastable charge states located near the QD plane [9]. These metastable charge states seem to originate from free carriers captured by deep level defects near the QD plane, so an understanding of point defect generation by the QD growth is vital.In this work the defects in different GaAs/InAs/GaAs samples are investigated by C-V, DLTS, and FDT measurements. The samples are imaged by transmission electron microscopy (TEM). A model of a development of the space charge region with applied bias is suggested which explains the observed phenomena. An evaluation method of the C -V measurements is given to check the validity of this model.