The
present study reports the presence of capacitive memory and
forming-free resistive random access memory (RRAM) in a tantalum pentoxide
(Ta2O5) thin film (TF) device. The capacitance
and voltage analysis of the electron-beam evaporated Ta2O5 TF device exhibits three distinct regimes: inversion,
depletion, and accumulation, which decrease as the frequency of operation
increases. This behavior is attributed to the interface state density
(D
it) and series resistance (R
s). Moreover, the memory window of the Ta2O5 device was found to increase from 1.2 (± 1 V) to 7.9
(± 10 V). Furthermore, the resistive switching mechanism was
investigated through the current (I) vs voltage (V) measurement for 1000 cycles. The device exhibits abnormal
forming-free bipolar resistive switching. In addition, a desirable
and stable switching behavior with resistance ratio of 102 and a retention up to 103 s at +2.5 V was observed. The
overall findings of the Au/Ta2O5 TF/Si device
could provide a pave way for nonvolatile memory (NVM) application.