“…We believe that the low energy luminescence of the triple QWs grown on (100) substrate, peaking at about 1.548 eV, is related to carbon impurities, most of which are the shallow impurities located near the interfaces of the Al 0.2 Ga 0.8 As/GaAs QWs. The luminescence tail at the low energy side is probably symbolizing the transition of electron-toacceptor in the wells [12][13][14][15]. It is reported by Petroff et al [11] and Miller et al [12] that the presence of carbon degrades the smoothness of the growing surface of AlGaAs layers due to its growth-inhibiting nature, Photoluminescence spectra (at 10 K) of the triple quantum wells grown on GaAs substrates misoriented by 0 • and 6 • , respectively, The dotted lines are two Gaussians being decomposed from the experimental spectrum of the untilted samples.…”