Noncontact Probe for Continuous Measurement of Surface Inclination and Position Using Dynamic Irradiation of Light Beam

Yamazaki, Kazuo; Lee, Kee Sein; Aoyama, Hideki; Sawabe, Masaji

doi:10.1016/s0007-8506(07)62515-3

Cited by 14 publications

(5 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Equipments to assemble targets, the material and fabrication process of the targets have been researched interiorly at present [3][4][5] , but research about measuring position of parts of targets during assembling and research about measuring location errors of capsules after assembling have not been reported. Optical non-contact probes have the advantages of no measuring force, high speed, etc [6] . Most of the optical non-contact probes have lower accuracy than contact ones.…”

Section: Introductionmentioning

confidence: 99%

Stability Research of Laser Confocal Probe for Measuring the Micro-Shpere

Wang

Zhu

Yang

2011

AMM

View full text Add to dashboard Cite

Laser confocal probe, on an active focus adjusting principle, was introduced in this paper. This kind of non-contact laser probe has the abilities to do the detection on strong reflection of the surface of high precision metal parts and optical devices. So, a problem of shape inspection detection was resolved. The micro-sphere is the key element in the ICF (short for inertial confinement fusion) system. The success or failure of "Ignition" is directly related to the accuracy of the assembly location of micro-sphere in the micro-target. Because of the particularity of the micro-sphere, laser confocal probe is used to do the detection of the center error of micro-sphere. The required measurement precision is less than 3µm. The mathematical formula between the height defference or the displacement value of measured surface and the displacement valued of the tuning fork can be gotten by the time different principle. Good stability of frequency and the swing of tuning fork, which approved through the experiments, have little influence to the time different Δt and the final measurement results.

show abstract

Section: Introductionmentioning

confidence: 99%

Stability Research of Laser Confocal Probe for Measuring the Micro-Shpere

Wang

Zhu

Yang

2011

AMM

View full text Add to dashboard Cite

show abstract

“…[3] Most of the optical non-contact probes have lower accuracy than contact probes. Surface conditions, including color, surface roughness, and inclination greatly affect the accuracy of the probe.…”

Section: Introductionmentioning

confidence: 99%

Design and Application of a Laser Confocal Probe

Qin¹,

Qiu²,

Lv³

et al. 2007

Instrumentation Science & Technology

View full text Add to dashboard Cite

To achieve the aim of precise measurement of a target micro-sphere, approximately 0.2 mm in diameter, a laser confocal probe was designed. To improve the output signal, a mathematical model of the photoelectric signal was proposed. The diameter of the pinhole was determined, and the optical path was adjusted; the oscillating units were designed. The performance of the probe was validated by experiments using gauge blocks combined with a micro-motion measuring mount model. Besides, a more accurate signal processing method was suggested.

show abstract

“…Optical non-contact probes possess the advantages of no measuring force, high speed etc [2][3][4]. Whereas, most of the optical non-contact probes have much lower accuracy than contact ones, for the surface conditions including color, surface roughness, inclination have significant effect on the accuracy of the probe [5].…”

Section: Introductionmentioning

confidence: 99%

An optimized design of a scanning confocal probe

et al. 2006

View full text Add to dashboard Cite

Basing on the principle of dynamic active confocal measuring method, a non-contact probe was introduced. The relation between the displacement of the object measured and the displacement of the oscillating unit was established by applying to the measure principle. To find the effect way to improve the output signal, a mathematical modal of the photoelectric signal was proposed. According to the mathematical modal, the diameter of the pinhole was decided and the optical path was adjusted, which improved the performance of the probe. It valuable to emphasize that the double lens oscillating unit was the crucial parts of the mechanical and optical structure. The tuning fork stimulating, inductive coils and the pinhole and photodiode adjuster device were designed according to the theoretical analysis, which were more convenient to the measure task. The stability of the oscillating unit was tested; and the optical and mechanical performance of the probe was validated by experiments using gage blocks combining with a micro-motion measuring mount model. The cost of a micro-displacement testing sensor was saved in designing of this kind of probe. A more accurate signal processing method was discussed in this paper.

show abstract

Noncontact Probe for Continuous Measurement of Surface Inclination and Position Using Dynamic Irradiation of Light Beam

Cited by 14 publications

References 14 publications

Stability Research of Laser Confocal Probe for Measuring the Micro-Shpere

Stability Research of Laser Confocal Probe for Measuring the Micro-Shpere

Design and Application of a Laser Confocal Probe

An optimized design of a scanning confocal probe

Contact Info

Product

Resources

About