2015
DOI: 10.1103/physrevapplied.4.054016
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Nonlinear Actuation Dynamics of Driven Casimir Oscillators with Rough Surfaces

Abstract: At separations below 100 nm, Casimir-Lifshitz forces strongly influence the actuation dynamics of microelectromechanical systems (MEMS) in dry vacuum conditions. For a micron size plate oscillating near a surface, which mimics a frequently used setup in experiments with MEMS, we show that the roughness of the surfaces significantly influences the qualitative dynamics of the oscillator. Via a combination of analytical and numerical methods, it is shown that surface roughness leads to a clear increase of initial… Show more

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Cited by 49 publications
(65 citation statements)
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“…[11][12][13] for a review). In so doing, puzzling findings concerning the role of dissipation of free charge carriers in metals have been reported [14][15][16][17][18][19] and important applications of dispersion forces in micromechanical systems [20][21][22] and nanochips [23] have been proposed.…”
Section: Introductionmentioning
confidence: 99%
“…[11][12][13] for a review). In so doing, puzzling findings concerning the role of dissipation of free charge carriers in metals have been reported [14][15][16][17][18][19] and important applications of dispersion forces in micromechanical systems [20][21][22] and nanochips [23] have been proposed.…”
Section: Introductionmentioning
confidence: 99%
“…The fixed plate is assumed to be coated by Au, while the rotatable one by the materials of interest Au, SiC, and AIST (C) (with coating thickness in all cases more than 100 nm to ensure optically bulk materials) [30,34]. For simplicity, we consider flat plates because at short separations (<100 nm) nanoscale roughness can have significance influence [26,[37][38][39]. The initial distance when the plates are parallel is assumed to be d = 200 nm, and the system temperature T = 300 K. The equation of motion for the torsional system is given by…”
Section: Modeling Of Dynamical Systemmentioning
confidence: 99%
“…Here we investigate the existence of chaotic behavior of the torsional system of finite quality factor Q during forced oscillation via an applied external torque τ o cos (ωt) [38]. In this case the the separatrix (homoclinic orbit) of the conservative system "splits".…”
Section: Non-conservative System (ε = 1)mentioning
confidence: 99%
“…The magnitude of this force is significant when H is less than a micron [3]. Therefore the Casimir effect must be taken into account in designing micro-and nano-devices [4][5][6][7].…”
Section: Introductionmentioning
confidence: 99%