Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators

Elshurafa, Amro M.; Khirallah, Kareem; Tawfik, H. H.; Emira, Ahmed; Aziz, Ahmed K.; Sedky, Sherif

doi:10.1109/jmems.2011.2148162

Cited by 117 publications

(81 citation statements)

References 32 publications

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“…In addition, the resonance frequencies of the drive and sense modes, of 3.1 KHz, are only 2 Hz apart (as shown in Figure 3). A Numerical model was built in Matlab/Simulink environment developed in [7] was utilized to investigate the behavior of both devices under different excitation values (DC and AC voltages). This modeling was essential to determine the maximum excitation that provides maximum driving amplitudes without causing nonlinearities.…”

Section: Simulation Resultsmentioning

confidence: 99%

A new vertical suspension inertial grade gyroscope

Aziz

Tawfik

Sharaf

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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This paper presents two novel architectures for realizing high performance bulk micromachined gyroscopes based on Silicon-on-Insulator (SOI) technology. The designs have a simulated Brownian noise floor of to 0.014 o /hr, a sensitivity 115 mV/ o /s, and a signal to noise ratio (SNR) of 1,437 mV/º/hr. These performance characteristics were achieved at resonance frequencies of few kilohertz. The backbone idea behind the proposed gyroscopes was the utilization of an out-ofplane suspension configuration comprising vertical beams, in which the latter can suspend a seismic proof mass of 1.6 mg. Measurements of the fabricated gyroscopes prove, for the first time, the concept of building MEMS devices using a vertical suspension arms.

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Section: Simulation Resultsmentioning

confidence: 99%

A new vertical suspension inertial grade gyroscope

Aziz

Tawfik

Sharaf

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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“…In general both phenomena can occur in a type of device, but depending on some condition (applied voltage, dimensions of the structure, etc) one of them dominates above the other, [34]. Nonlinearity in springs appears for large deflections.…”

Section: Nonlinear Springsmentioning

confidence: 99%

“…Nonlinearity in springs appears for large deflections. For example, in the case of thin fixed-fixed beams, or tethers, it appears when the displacement of the proof mass is comparable or larger than the thickness of the springs, resulting in an increase of the strain energy due to stretching of the neutral surface, [34,35,36]. This is obviously an unwanted phenomenon in linear devices whereas it is a desired feature in those applications, such as energy harvesting, on which nonlinearity is sought as a means to increase bandwidth.…”

Section: Nonlinear Springsmentioning

confidence: 99%

MEMS Technologies for Energy Harvesting

Domínguez-Pumar

Pons-Nin

Chávez-Domínguez

2016

Nonlinearity in Energy Harvesting Systems

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The objective of this chapter is to introduce the technology of Microelectromechanical Systems, MEMS, and its application to emerging energy harvesting devices. The chapter begins with a general introduction to the most common MEMS fabrication processes. Next, the chapter follows with a survey of design mechanisms implemented in MEMS energy harvesters to provide nonlinear mechanical actuations. Mechanisms to produce bistable potential will be studied, such as by placing fixed magnets, buckling of beams, or by using slightly slanted clamped-clamped beams. Other nonlinear mechanisms are studied such as impact energy transfer, or the design of nonlinear springs. Finally, due to their importance in the field of MEMS and their application to energy harvesters, an introduction to the actuation with piezoelectric materials is made. Examples of energy harvesters found in the literature using this actuation principle are also presented.

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“…Abed et al (19) proposed a multimodal vibration energy harvesting approach based on arrays of coupled levitated magnets. A normalized power of 20.2 mW·cm The bandwidth of the vibration system can be effectively broadened by nonlinear vibration systems that have monostable, (20) bistable, (21)(22)(23) and multistable (24) states. Magnetic force is often used to build nonlinear vibration energy harvesters.…”

Section: Introductionmentioning

confidence: 99%

Study on the Diamagnetic Levitation Structure in Electromagnetic Vibration Energy Harvester

Zhang¹,

Zhang²,

Duan³

et al. 2018

Sensors and Materials

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In this paper, we proposed an electromagnetic vibration energy harvester with a diamagnetic levitation structure, which consists of a lifting magnet, two highly oriented pyrolytic graphite (HOPG) sheets, and a floating magnet. The dynamic characteristics of the diamagnetic levitation structure are critical to the performance of the energy harvester. The diamagnetic and magnetic forces were calculated in COMSOL TM , and the bistable phenomenon of the diamagnetic levitation structure was found and verified experimentally. The nonlinear characteristics of the diamagnetic levitation structure were studied in Simulink. Under different external excitations, the intrawell and interwell vibrations were observed in phase diagrams. When the excitation frequency is 1 Hz and the amplitude is 8.1 mm, the low-energy region is similar to the high-energy region, which is beneficial to harvest energy.

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Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators

Cited by 117 publications

References 32 publications

A new vertical suspension inertial grade gyroscope

A new vertical suspension inertial grade gyroscope

MEMS Technologies for Energy Harvesting

Study on the Diamagnetic Levitation Structure in Electromagnetic Vibration Energy Harvester

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