Nonlinear Multi-Mode Wideband Piezoelectric MEMS Vibration Energy Harvester

Nabavi, Seyedfakhreddin; Zhang, Lihong

doi:10.1109/jsen.2019.2904025

Cited by 65 publications

(29 citation statements)

References 42 publications

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“…The NPD was determined (according to the Equation (2) with an assumption that the effective volume was ≈1.72 × 10 −3 cm 3 ) having a value in a range of ≈2.3 mW• cm −3 •g −2 to ≈1.5 mW•cm −3 •g −2 for A in range of 0.25 g to 2 g (Figure 10b). Such values of NPD are ≈2-10 times higher in comparison to previously published NPD [24][25][26][27][28]. The BW value was also determined for frequencies at FWHM of the spectrum, at a constant of A ≈0.5 g and reached a value of ≈2.8 Hz.…”

Section: Vibrational Characterizationmentioning

confidence: 60%

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

et al. 2020

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In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficients d33 of (7.33 ± 0.08) pC∙N−1. The fabrication of PEH was completed using just three lithography steps, conventional silicon substrate with full control of the cantilever thickness, in addition to the thickness of the proof mass. As the AlN deposition was conducted at a temperature of ≈330 °C, the process can be implemented into standard complementary metal oxide semiconductor (CMOS) technology, as well as the CMOS wafer post-processing. The PEH cantilever deflection and efficiency were characterized using both laser interferometry, and a vibration shaker, respectively. This technology could become a core feature for future CMOS-based energy harvesters.

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Section: Vibrational Characterizationmentioning

confidence: 60%

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

et al. 2020

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“…Through FEM, the CB is initially developed using the proposed input parameters (i.e., Tables 1-3) and triangular mapped meshing to facilitate discretisation. Eigenfrequency analysis is conducted to identify the range of resonant frequencies that the CB is able to operate in, while verifying against equations (4) and (5). Thus, a range of 20-220 Hz has been identified, which is relatively similar to the vibration frequency range of common ambient vibration sources.…”

Section: Optimisation Of the Cantilever Beammentioning

confidence: 99%

“…Vibration-based energy harvesting technology is commonly associated with piezoelectric mechanisms that convert mechanical energy into electrical energy based on detected ambient vibrations. Notably, the piezoelectric vibration energy harvester (PVEH) is known for its high power density and high energy conversion efficiency [4][5][6][7]. The PVEH typically employs a piezoelectric cantilever beam (CB) with a proof mass mounted at its free end while its other end is fixed to a centralised, vibrating host structure.…”

Section: Introductionmentioning

confidence: 99%

A Novel Self-Powered Dynamic System Using a Quasi-Z-Source Inverter-Based Piezoelectric Vibration Energy Harvester

2020

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The use of quasi-Z-source inverters (qZSIs) for DC-DC power conversion applications has gained much recognition when dealing with grid-tied renewable energy resource integrations. This paper proposes a novel self-powered dynamic system (SPDS) involving a piezoelectric vibration energy harvester (PVEH) using qZSI to establish interoperability with a DC load rated at 16.15 mW. Based on uncertain output performances from a piezoelectric cantilever beam (CB), the qZSI-based PVEH serves as a dynamic voltage restoration unit that establishes load-following synchronisation. It uses a proportional-integral based boost controller (PI-based BC) to generate strategic ordering of shoot-through voltage amplification into pulse-width modulation (PWM) gating sequences. The SPDS was modelled using two software based on commercially available product specifications: (i) COMSOL Multiphysics to mechanically design and optimise a CB. (ii) PSCAD/EMTDC to electronically design and integrate the qZSI with the optimised CB, while functioning as a testbed to model the SPDS against arbitrary wind speed and structural vibration frequency data collected from an above-ground mass rapid transit (MRT) train station in Khatib, Singapore. The acquired simulation results have depicted desirable transient responses at respective sub-systems, procuring fast settling-time responses, negligible steady-state error, as well as high efficiencies of 94.07% and 91.64% for the CB and SPDS respectively.

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“…As a functional material, piezoelectric ceramics play an irreplaceable role in modern intelligent industry [1][2][3]. Piezoelectric ceramics have been widely used in modern intelligent devices, such as pressure sensors [4], vibration energy collecting devices [5], intelligent wearable devices with human-computer interaction [6], and so on. At the same time, with the advent of MEMS (Micro-Electro-Mechanical System), the inverse piezoelectric driving technology that converts electrical energy into mechanical energy has become a research hotspot in research concerning modern micromachines [7,8].…”

Section: Introductionmentioning

confidence: 99%

Design and Experimental Verification of a PZT Pump with Streamlined Flow Tubes

et al. 2019

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In this paper, a streamlined flow tube valveless piezoelectric pump (SLFT PZT pump) is proposed to modify the single flow trend and improve the fluid flow stability. Firstly, the structural and working principle of the streamlined flow tube, which accounts for changing the flow trend and improving the flow stability, were analyzed. The flow resistance and flow rate equations were established. Secondly, the pressure and velocity fields of the tube were simulated. These simulated results were consistent with the theoretical results. Thirdly, the flow resistance of the flow tube was tested with pressure differences of 1000 Pa, 1200 Pa, 1400 Pa and 1600 Pa respectively. The trend of the result curves was consistent with the simulated results. The amplitude-frequency relationship and the flow-rate-frequency relationship were also tested, both result curves highly corelate. The maximum amplitude was 0.228 mm (10 Hz, 120 V), and the maximum flow rate was 17.01 mL/min (10 Hz, 100 V). Finally, the theoretical flow rate of the SLFT PZT pump was calculated at 100 V and 120 V. These results roughly fitted with the experimental results. The streamlined flow tube could change the internal flow trend that remarkably improved the flow stability. Therefore, it promoted the application of the valveless PZT pump in living cells, biomedical and polymer delivery.

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Nonlinear Multi-Mode Wideband Piezoelectric MEMS Vibration Energy Harvester

Cited by 65 publications

References 42 publications

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

A Novel Self-Powered Dynamic System Using a Quasi-Z-Source Inverter-Based Piezoelectric Vibration Energy Harvester

Design and Experimental Verification of a PZT Pump with Streamlined Flow Tubes

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