Nonlinear Pull-In Study of Electrostatically Actuated MEMS Structures

Kalyanaraman, R.; Packirisamy, Muthukumaran; Bhat, Ramaraja

doi:10.1109/icisip.2005.1619435

Cited by 5 publications

(2 citation statements)

References 6 publications

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“…As the parameter is varied a saddle-node bifurcations occurs in which the saddle point coalesces with the stable equilibrium at a critical value of the DC voltage. This model for the dynamics is well understood, and can also be derived for continuous systems with distributed electrostatic forces, so long as the mechanical system response is dominated by a single mode [57]. A systematic investigation of this situation, involving experimentation and comparison with a mathematical model for a microbeam, is described by Krylov and Maimon [58].…”

Section: Pull-inmentioning

confidence: 99%

Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators

Rhoads

Shaw

Turner

2008

ASME 2008 Dynamic Systems and Control Conference, Parts a and B

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This review provides a summary of the work completed to date on the nonlinear dynamics of resonant micro- and nanoelectromechanical systems (MEMS/NEMS). This research area, which has been active for approximately a decade, involves the study of nonlinear behaviors arising in small scale, vibratory, mechanical devices that are typically integrated with electronics for use in signal processing, actuation, and sensing applications. The inherent nature of these devices, which includes low damping, desired resonant operation, and the presence of nonlinear potential fields, sets an ideal stage for the appearance of nonlinear behavior, and this allows engineers to beneficially leverage nonlinear dynamics in the course of device design. This work provides an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, such as localization and synchronization, which arise in coupled resonator arrays. In addition, the work describes the active exploitation of nonlinear dynamics in the development of resonant mass sensors, inertial sensors, and electromechanical signal processing systems. The paper closes with some brief remarks about important ongoing developments in the field.

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Section: Pull-inmentioning

confidence: 99%

Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators

Rhoads

Shaw

Turner

2008

ASME 2008 Dynamic Systems and Control Conference, Parts a and B

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“…In most textbooks on electrostatic MEMS actuators [9]- [14], the working of the system is described in terms of displacement of the movable part. Phase plane analysis [14], [15] also uses displacement to describe the dynamics and stability of the actuator. In this article, we present the first investigation of electrostatic MEMS actuators with charge as the parameter to describe their statics and dynamics.…”

Section: Introductionmentioning

confidence: 99%

Analysis of Electrostatic MEMS Using Energy-Charge Landscape

Raman,

Ajoy,

Padmanabhan

2020

Preprint

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A common way to analyze electrostatic Micro Electro Mechanical Systems (MEMS) actuators is to use their energy-displacement landscape. Here, we introduce an alternative approach to analyze electrostatic MEMS actuators using their energy-charge landscape. This technique involves coordinate transformation from displacement to charge, thereby formulating the Hamiltonian of electrostatic MEMS actuators in terms of charge. We present the first investigation on using the energycharge landscape to analyze static pull-in, dynamic pull-in and pull-out phenomena in a unified manner. The voltage expressions derived using this method are identical with those derived using the conventional energy-displacement landscape. In addition, we also obtain the expressions for charge under static and dynamic pull-in conditions. This work can aid in the design and analysis of electrostatic MEMS devices.

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