Theoretical studies have been conducted to comprehend these characteristics in ultrathin gold films. [6,7] However, the fabrication of such thin films is generally quite difficult. For conventional plasmonic metals, such as silver and gold, continuous, smooth films with thicknesses lower than 10 nm are challenging to produce because of island formation and large defect concentrations which result from their high surface energy. [8][9][10] On the other hand, transition metal nitrides (TiN, ZrN, etc.) can be grown epitaxially on substrates such as c-sapphire and MgO, [11] enabling the formation of continuous ultrathin films down to 2 nm while maintaining high quality. [12] These materials have gained much interest for plasmonic applications for the visible and near-infrared region due to their tailorable optical properties and refractory quality. [13] TiN has already been shown to have potential applications in photovoltaics, [14,15] waveguiding, [16] modulators, [17,18] and nonlinear optical devices. [3,19] Although some of these devices use films of ≈10 nm, there is additional interest in the formation of ultrathin metallic films (<10 nm) which may facilitate additional applications. To support this, there have been efforts to grow ultrathin TiN films using atomic layer deposition (ALD). However, these films become dielectric below 5 nm and may not be useful for nanophotonic applications. [20] This is because TiN thin films grown using ALD with a TiCl 4 precursor are more prone to Cl impurities, which could result in a degradation of the metallic properties in thinner films. [21][22][23] In the present study, we have grown continuous, epitaxial, ultrathin TiN films that remain plasmonic in the optical range via DC reactive magnetron sputtering. Using sputtering to grow the film decreases the chance of contamination since only Ti, N, and Ar are introduced into the system, which helps maintain the metallic properties in ultrathin films. The dielectric permittivity of these films was extracted using spectroscopic ellipsometry, while Hall measurements give further insight into the optical behavior of the films.
Results and DiscussionUltrathin TiN films with thicknesses of 2, 4, 6, 8, and 10 nm were grown on MgO using DC reactive magnetron sputtering. Due to the lattice matching between TiN (4.24 Å) and substrates such as MgO (4.21 Å) and sapphire (4.76 Å), high quality,Overcoming the challenge of growing ultrathin metallic films is of great importance for practical applications of nanoplasmonic structures. In the present work, epitaxial, ultrathin (<10 nm) films of plasmonic TiN are grown on MgO using DC reactive magnetron sputtering. The optical properties of the films are studied through variable angle spectroscopic ellipsometry and Hall measurements. As the film thickness decreases, they become less metallic and exhibit higher loss while still remaining plasmonic in the optical range. These trends are related to the decreasing carrier concentration in the thinner films and increased scattering, respectively. Howev...